Formation of hillocks in Pt/Ti electrodes and their effects on short phenomena of PZT films deposited by reactive sputtering

Thin Solid Films

Volumn 371, Issue 1, 2000, Pages 264-271

  Nam, Hyo Jin ^a   Choi, Duck Kyun ^b   Lee, Won Jong ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTROCHEMICAL ELECTRODES; FERROELECTRIC MATERIALS; GRAIN BOUNDARIES; LEAD COMPOUNDS; OXIDATION; PARTIAL PRESSURE; SPUTTER DEPOSITION; THIN FILMS;

HILLOCKS;

DIELECTRIC FILMS;

EID: 0033703994     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00970-6     Document Type: Article

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