SCOPUS 정보 검색 플랫폼

Volumn 448-451, Issue , 2007, Pages 769-773

Thermal dewetting of Pt thin film: Etch-masks for the fabrication of semiconductor nanostructures

Author keywords

Dewetting; GaN; Nanostructure; Pt; Thermal annealing

Indexed keywords

ANNEALING; DENSITY CONTROL (SPECIFIC GRAVITY); NANOSTRUCTURES; TEMPERATURE; TEMPERATURE CONTROL; THIN FILMS;

ANNEALING TEMPERATURE; PLATINUM THIN FILM; SEMICONDUCTOR NANOSTRUCTURES; THERMAL ANNEALING; THERMAL DEWETTING;

PLATINUM;

ANNEALING; DENSITY CONTROL (SPECIFIC GRAVITY); NANOSTRUCTURES; PLATINUM; TEMPERATURE; TEMPERATURE CONTROL; THIN FILMS;

EID: 33847179777 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/j.msea.2006.02.403 Document Type: Article

Times cited : (80)

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