Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes

Lab on a Chip

Volumn 5, Issue 3, 2005, Pages 326-336

  Tiggelaar, R M ^a   Berenschot, J W ^a   De Boer, J H ^a   Sanders, R G P ^a   Gardeniers, J G E ^a   Oosterbroek, R E ^a   Van Den Berg, A ^a   Elwenspoek, M C ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON NITRIDE;

ADHESION; ARTICLE; CATALYSIS; CHEMICAL REACTION; ELECTRIC CONDUCTIVITY; FILM; HEAT TREATMENT; HIGH TEMPERATURE; PHASE TRANSITION; PRIORITY JOURNAL; REACTION ANALYSIS; REACTOR; SENSOR; TEMPERATURE DEPENDENCE; THICKNESS;

EID: 16244399809     PISSN: 14730197     EISSN: None     Source Type: Journal    
DOI: 10.1039/b414857f     Document Type: Article

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