Stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors

Sensors and Actuators, B: Chemical

Volumn 65, Issue 1, 2000, Pages 190-192

  Esch, H ^a   Huyberechts, G ^a   Mertens, R ^a   Maes, G ^b   Manca, J ^c   De Ceuninck, W ^c   De Schepper, L ^c  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c Institute of Materials Research   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON SENSORS; THIN FILM DEVICES; TIN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

TIN OXIDE;

CHEMICAL SENSORS;

EID: 0034733341     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00301-9     Document Type: Article

References (3)

1. Al-Shareef H.N., Gifford K.D., Rou S.H., Hren P.D., Auciello O. Integrated Ferroelectrics. 3:1993;321.
2. Kneer E.M., Birnie D.P., Schrimpf R.D., Podlesny J.C., Teowee G. Integrated Ferroelectrics. 7:1995;61.
3. L. Stals, L. De Schepper, W. De Ceuninck, J. Roggen, Patent No. PCT/EP90/00291, 1990.