Microstructural changes of Pt/Ti bilayer during annealing in different atmospheres - An XRD study

Thin Solid Films

Volumn 300, Issue 1-2, 1997, Pages 122-130

  Ehrlich, Andreas ^a   Weiß, Uwe ^a   Hoyer, Walter ^a   Geßner, Thomas ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Annealing; Platinum; Structural properties; Titanium; X ray diffraction

Indexed keywords

ANNEALING; DEPOSITION; FERROELECTRIC MATERIALS; GRAIN BOUNDARIES; METALLIC FILMS; METALLOGRAPHIC MICROSTRUCTURE; PHASE TRANSITIONS; PLATINUM; STRESSES; TENSILE STRENGTH; TITANIUM; X RAY DIFFRACTION ANALYSIS;

ELECTRODE BILAYERS;

THIN FILMS;

EID: 0031146842     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09452-7     Document Type: Article

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