Design and characterization of MEMS-based flow-rate and flow-direction microsensor

Microfluidics and Nanofluidics

Volumn 6, Issue 3, 2009, Pages 363-371

  Lee, Chia Yen ^a   Wen, Chih Yung ^b   Hou, Hui Hsiung ^b   Yang, Ruey Jen ^b   Tsai, Chien Hsiung ^a   Fu, Lung Ming ^a  

^a NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Flow direction; Flow rate; MEMS; Micro sensor

Indexed keywords

ATOMIC FORCE MICROSCOPY; BENDING (DEFORMATION); CANTILEVER BEAMS; COMBUSTORS; GAS DYNAMICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; PILE FOUNDATIONS; PLATINUM; RESISTORS; SILICON NITRIDE; THERMAL CONDUCTIVITY;

AERODYNAMIC FORCES; AIR TRAVELS; AIRFLOW DISTRIBUTIONS; BAFFLE PLATES; CANTILEVER STRUCTURES; FLOW DIRECTIONS; FLOW-DIRECTION; FLOW-RATE; MICRO-SENSOR; NUMERICAL INVESTIGATIONS; PLATINUM RESISTORS; SENSING PLATFORMS; SENSOR PERFORMANCE; SENSOR SENSITIVITIES; SILICON BEAMS; SILICON CANTILEVER BEAMS; SILICON NITRIDE FILMS; UPPER SURFACES;

NANOCANTILEVERS;

EID: 62649169617     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-008-0381-6     Document Type: Article

References (36)

1. Abbaspour-Sani E, Javan D (2008) Analytical study of resistive MEM gas flow meters. Microsyst Technol 14:89-94
2. Abedinov N, Popov C, Yordanov Z, Rangelow IW, Kulisch W (2004) Investigations of the sorption behaviour of amorphous nitrogen-rich carbon nitride films as sensitive layers for cantilever-based chemical sensors. Appl Phys A 79:531-536
3. Adamovskii LA (2007) Vortex electromagnetic flow meters for liquid metal coolants. Meas Tech 50:58-65
4. Binnig G, Quate CF (1986) Atomic force microscope. Phys Rev Lett 56:930-933
5. 2 microcantilever for high sensitive moisture sensor. Microsyst Technol 14:739-746
6. Choudhury A, Hesketh PJ, Thundat T, Hu Z (2007) A piezoresistive microcantilever array for surface stress measurement: Curvature model and fabrication. J Micromech Microeng 17:2065-2076
7. Fair RB (2007) Digital microfluidics: Is a true lab-on-a-chip possible. Microfluid Nanofluid 3:245-281
8. Fu LM, Lin CH (2007) A novel fast DNA digestion system. Biomed Microdevices 9:277-286
9. Fu LM, Lee CY, Liao MH, Lin CH (2008) Fabrication and testing of high-performance detection sensor for capillary electrophoresis microchips. Biomed Microdevices 10:73-80
10. Groß GA, Thyagarajan V, Kielpinski M, Henkel T, Köhler JM (2008) Viscosity-dependent enhancement of fluid resistance in water/ glycerol micro fluid segments. Microfluid Nanofluid 5:281-287
11. Guillot P, Moulin T, Kötitz R, Guirardel M, Dodge A, Joanicot M, Colin A, Bruneau C, Colin T (2008) Towards a continuous microfluidic rheometer. Microfluid Nanofluid 5:619-630
12. Gupta A, Denton JP, McNally H, Bashir R (2003) Novel fabrication method for surface micromachined thin single-crystal silicon cantilever beams. IEEE J Microelectromech Syst 12:185-192
13. Hsueh CH, Luttrell CR, Cui T (2006) Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators. J Micromech Microeng 16:2509-2515
14. Kim DK, Kang SG, Sim JH, Shin JK, Choi P, Lee JH (2000) Characteristics of piezoresistive mass flow sensors fabricated by porous silicon micromachining. Jpn J Appl Phys 39:7134-7137
15. Kim S, Nam T, Park S (2004) Measurement of flow direction and velocity using a micromachined flow sensor. Sens Actuators A 114:312-318
16. Kim YM, Yoon HC, Seo CT, Lee JH (2005) Fabrication of micro probe beam using MEMS technology for new vertical silicon probe card. Jpn J Appl Phys 44:5759-5763
17. Kjeang E, Roesch B, McKechnie J, Harrington DA, Djilali N, Sinton D (2007) Integrated electrochemical velocimetry for microfluidic devices. Microfluid Nanofluid 3:403-416
18. Korotcenkov G (2007) Practical aspects in design of one-electrode semiconductor gas sensors: Status report. Sens Actuators B 121:664-678
19. Korsunsky AM, Cherian S, Raiteri R, Berger R (2007) On the micromechanics of micro-cantilever sensors: Property analysis and eigenstrain modeling. Sens Actuators A 139:70-77
20. Lee CY, Lee GB (2003) A microcantilever-based humidity sensor with temperature compensation. J Micromech Microeng 13:620-627
21. Lee CY, Chen CM, Chang GL, Lin CH, Fu LM (2006a) Fabrication and characterization of semicircular detection electrodes for contactless conductivity detector-capillary electrophoresis microchips. Electrophoresis 27:5043-5050
22. Lee CY, Lin CH, Chou PC, Fu LM, Hsieh PR, Chiang CM (2006b) MEMS-based formaldehyde gas sensor integrated with a micro-hotplate. Microsyst Technol 12:893-898
23. Ma RH, Ho MC, Lee CY, Wang YH, Fu LM (2006) Micromachined silicon cantilever paddle for high-flow-rate sensing. Sens Mater 18:405-417
24. Mailly F, Giani A, Bonnot R, Temple-Boyer P, Pascal-Delannoy F, Foucaran A, Boyer A (2001) Anemometer with hot platinum thin film. Sens Actuators A 94:32-38
25. Makinwa KAA, Huijsing JH (2002) Constant power operation of a two-dimensional flow sensor. IEEE Trans Instrum Meas 51:840-844
26. Mohr S, Zhang YH, Macaskill A, Day PJR, Barber RW, Goddard NJ, Emerson DR, Fielden PR (2007) Numerical and experimental study of a droplet-based PCR chip. Microfluid Nanofluid 3:611-621
27. Neda T, Nakmura K, Takumi T (1996) A polysilicon flow sensor for gas flow meters. Sens Actuators A 54:626-631
28. Patankar SV (1980) Numerical heat transfer and fluid flow. Hemisphere, Washington DC
29. Shin WC, Besser RS (2006) A micromachined thin-film gas flow sensor for microchemical reactors. J Micromech Microeng 16:731-741
30. Su Y, Evans AGR, Brunnschweile A, Ensell G (2002) Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing. J Micromech Microeng 12:780-785
31. Svedin N, Stemme E, Stemme G (2003) IEEE J Microelectromech Syst 12:937-942
32. Tellier CR, Leblois TG (2006) On the design of GaAs (hhl) resonant cantilevers study of piezoelectric excitation, of piezoresistive sensing and of micromachined structure. Sens Actuators A 132:224-235
33. Tuomas PJ, Knowles TPJ, Shu W, Huber F, Lang HP, Gerber C, Dobson CM, Welland ME (2008) Label-free detection of amyloid growth with microcantilever sensors. Nanotechnology 19:384007
34. Velanki S, Ji HF (2006) Detection of feline coronavirus using microcantilever sensors. Meas Sci Technol 17:2964-2968
35. Wang YH, Lee CY, Lin CH, Fu LM (2008) Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors. Microsyst Technol 14:995-1000
36. Yamazoe N (2005) Toward innovations of gas sensor technology. Sens Actuators B 108:2-14