On the micromechanics of micro-cantilever sensors: Property analysis and eigenstrain modeling

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 70-77

  Korsunsky, Alexander M ^a   Cherian, Suman ^b   Raiteri, Roberto ^b   Berger, Rüdiger ^c  

^a UNIVERSITY OF OXFORD   (United Kingdom)

^b UNIVERSITY OF GENOA   (Italy)

^c MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

Author keywords

Bio sensor; Eigenstrain modeling; Finite element modeling; Micro cantilever; Residual stress

Indexed keywords

BIOSENSORS; CALIBRATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMECHANICS; NATURAL FREQUENCIES; RESIDUAL STRESSES;

CANTILEVER TRANSDUCTION EFFECTS; EIGENSTRAIN MODELING; RESONANCE FREQUENCIES; THERMAL MISMATCH EFFECTS;

MICROSENSORS;

EID: 34548174272     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.03.007     Document Type: Article

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