On the design of GaAs (hhl) resonant cantilevers. Study of piezoelectric excitation, of piezoresistive sensing and of micromachined structure

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 224-235

  Tellier, C R ^a   Leblois, T G ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

Gallium arsenide; Micro resonator; Micromachining; Piezoresistive sensing

Indexed keywords

CRYSTAL ORIENTATION; GALLIUM COMPOUNDS; MICROMACHINING; NATURAL FREQUENCIES; PIEZOELECTRICITY; PRODUCT DESIGN; SENSORS; VIBRATIONS (MECHANICAL);

ETCHING SHAPES; MICRO RESONATORS; PIEZORESISTIVE SENSING;

RESONATORS;

EID: 33751110958     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.02.001     Document Type: Article

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