Enhanced sensing characteristics in MEMS-based formaldehyde gas sensors

Microsystem Technologies

Volumn 14, Issue 7, 2008, Pages 995-1000

  Wang, Yu Hsiang ^a   Lee, Chia Yen ^a   Lin, Che Hsin ^b   Fu, Lung Ming ^c  

^a DA YEH UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ELECTROCHEMICAL ELECTRODES; FORMALDEHYDE; MICROFABRICATION; SENSITIVITY ANALYSIS; THICKNESS MEASUREMENT;

FABRICATION SEQUENCES; MICRO HEATERS; RESOLUTION CAPABILITIES;

MEMS;

EID: 44249118851     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0460-8     Document Type: Conference Paper

References (11)

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