A micromachined thin-film gas flow sensor for microchemical reactors

Journal of Micromechanics and Microengineering

Volumn 16, Issue 4, 2006, Pages 731-741

  Shin, W C ^a   Besser, R S ^a  

^a STEVENS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; CHEMICAL SENSORS; FLUID DYNAMICS; HEAT CONVECTION; RESISTORS;

CALORIMETRIC SENSING; MICROCHEMICAL REACTORS; REPRODUCIBILITY TESTS; SUBMILLIMETER CHANNEL;

THIN FILMS;

EID: 33645052181     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/4/009     Document Type: Article

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