Measurement of flow direction and velocity using a micromachined flow sensor

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 312-318

  Kim, Seunghyun ^a   Nam, Teckjin ^a   Park, Sekwang ^a  

^a Kyungpook National University   (South Korea)

Author keywords

Circular type; Flow direction; Gap; Heat transfer; Velocity

Indexed keywords

CONFINED FLOW; DIAPHRAGMS; HEAT CONDUCTION; HEAT TRANSFER; MICROMACHINING; OPTIMIZATION; SENSITIVITY ANALYSIS; SPECIFIC HEAT; VELOCITY MEASUREMENT;

CIRCULAR-TYPE; FLOW DIRECTION; FLOW SENSORS; GAP;

SILICON SENSORS;

EID: 4344582223     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.019     Document Type: Article

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