Micromachined SiO2 microcantilever for high sensitive moisture sensor

Microsystem Technologies

Volumn 14, Issue 6, 2008, Pages 739-746

  Chen, Qi ^a   Fang, Ji ^a   Ji, Hai Feng ^a   Varahramyan, Kody ^a  

^a LOUISIANA TECH UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; COMPUTER SIMULATION; DRY ETCHING; ELASTIC MODULI; ENVIRONMENTAL MANAGEMENT; MOISTURE;

ANISOTROPIC DRY ETCHING; MICROCANTILEVER BEAMS; MOISTURE DETECTION; SPECIFIC REACTIONS;

HUMIDITY SENSORS;

EID: 43049130795     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0489-8     Document Type: Article

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