A piezoresistive microcantilever array for surface stress measurement: Curvature model and fabrication

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 2065-2076

  Choudhury, Arnab ^a   Hesketh, Peter J ^a   Thundat, Thomas ^b   Hu, Zhiyu ^a,b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; MICROSYSTEMS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; STRESS ANALYSIS; SURFACE PROPERTIES;

PIEZORESISTIVE MICROCANTILEVER ARRAYS; PIEZORESISTIVE RESPONSES; SURFACE-STRESS-SENSITIVE CANTILEVERS;

PIEZOELECTRIC DEVICES;

EID: 34748914797     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/019     Document Type: Article

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