메뉴 건너뛰기




Volumn 121, Issue 2, 2007, Pages 664-678

Practical aspects in design of one-electrode semiconductor gas sensors: Status report

Author keywords

Advantages and disadvantages; Design and fabrication; One electrode semiconductor gas sensors; Optimization; Parameters; Peculiarities

Indexed keywords

ELECTRODES; OPTIMIZATION; PARAMETER ESTIMATION; SOLID STATE DEVICE STRUCTURES;

EID: 33846576123     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.04.092     Document Type: Review
Times cited : (116)

References (94)
  • 1
    • 33846634006 scopus 로고    scopus 로고
    • W. Gopel, J. Hense, H. Baltes (Eds.), Sensors Update, vol. 1-8, VCH, New York, 1996-2002.
  • 2
    • 0033533279 scopus 로고    scopus 로고
    • Semiconducting oxides as gas-sensitive resistors
    • Williams D.E. Semiconducting oxides as gas-sensitive resistors. Sens. Actuators B 57 (1999) 1-16
    • (1999) Sens. Actuators B , vol.57 , pp. 1-16
    • Williams, D.E.1
  • 4
    • 0003619037 scopus 로고
    • Moseley P.T., and Tofield B.C. (Eds), IOP Publ., Bristol, UK
    • In: Moseley P.T., and Tofield B.C. (Eds). Solid State Gas Sensors (1987), IOP Publ., Bristol, UK
    • (1987) Solid State Gas Sensors
  • 5
    • 0003863656 scopus 로고
    • Sberveglieri G. (Ed), Kluwer Academic Publishers, The Netherlands
    • In: Sberveglieri G. (Ed). Gas Sensors (1992), Kluwer Academic Publishers, The Netherlands
    • (1992) Gas Sensors
  • 6
    • 0343289075 scopus 로고    scopus 로고
    • Micromachined metal-oxide gas sensors: opportunities to improve sensor performance
    • Simon I., Barsan N., Bauer M., and Weimar U. Micromachined metal-oxide gas sensors: opportunities to improve sensor performance. Sens. Actuators B 73 (2001) 1-26
    • (2001) Sens. Actuators B , vol.73 , pp. 1-26
    • Simon, I.1    Barsan, N.2    Bauer, M.3    Weimar, U.4
  • 7
    • 33846648334 scopus 로고    scopus 로고
    • K. Komatsu, S. Sasaki, K. Fukui, Gas sensors. New Cosmos Electric Co., Ltd., European Patent EPA-0115953 (1984).
  • 8
    • 33846641955 scopus 로고    scopus 로고
    • S.V. Baran, S.N. Malchenko, G.A. Branitsky, D.R. Orlik, S.N. Novotorsev, V.G. Levteev, V.A. Chydakov, Method for the production of sensitive element, Soviet Union Patent 1,445,393 (1986).
  • 9
    • 33846647776 scopus 로고    scopus 로고
    • N. Komori, T. Sakai, K. Komatsu, New Cosmos Electric Co., Ltd., Detecting method of gas leak from underground buried pipe of town gas. Japan Patent JP07209152 (June 1989).
  • 10
    • 33846625462 scopus 로고    scopus 로고
    • K. Naya, H. Segawa, Nippon Mining Co., Ltd., Apparatus for detecting finishing point of drying of dry cleaning solvent. Japan Patent JP02067951 (March 1990).
  • 11
    • 33846624991 scopus 로고    scopus 로고
    • T. Tadashi, S. Hiroaki, K. Hiroki, Hot-wire-type semiconductor sensor and usage thereof, New Cosmos Electric Corp., Japan Patent G01N27/12 (1992).
  • 12
    • 33846569779 scopus 로고    scopus 로고
    • S. Sakai, M. Nakatani, New Cosmos Electric Co., Ltd., Gas detecting method and apparatus. European Patent EP0653632 (May 1995).
  • 13
    • 33846614860 scopus 로고    scopus 로고
    • T. Sakai, M. Nakatani, New Cosmos Electric Co., Ltd., Method and device for detecting gas, Japan Patent JP07174725 (July 1995).
  • 14
    • 33846598267 scopus 로고    scopus 로고
    • U. Takahiro, Hot-wire type semiconductor gas sensors, Matsushita Electric Inc. Co., Ltd., Japan Patent JP2002350381 (2002).
  • 16
    • 0026835966 scopus 로고
    • One electrode semiconductor sensors for detection of toxic and explosive gases in air
    • Malchenko S.N., Lychkovski Y.N., and Baykov M.V. One electrode semiconductor sensors for detection of toxic and explosive gases in air. Sens. Actuators B 7 (1992) 505-506
    • (1992) Sens. Actuators B , vol.7 , pp. 505-506
    • Malchenko, S.N.1    Lychkovski, Y.N.2    Baykov, M.V.3
  • 19
    • 33846642439 scopus 로고    scopus 로고
    • Innovatsensor Enterprise, One-electrode semiconductor (OESS) sensing element and sensors on its basis. Sensors and Transducers e-Digest (www.sensorportable.com). IFSA, N 3 December 2000.
  • 21
    • 0035823684 scopus 로고    scopus 로고
    • Function and application of gas sensors
    • Kohl D. Function and application of gas sensors. J. Phys. D: Appl. Phys. 34 (2001) R125-R149
    • (2001) J. Phys. D: Appl. Phys. , vol.34
    • Kohl, D.1
  • 22
    • 0033739101 scopus 로고    scopus 로고
    • Theoretical study of semiconductor thin film gas sensitivity: attempt to consistent approach
    • Brynzari V., Korotchenkov G., and Dmitriev S. Theoretical study of semiconductor thin film gas sensitivity: attempt to consistent approach. J. Electron Technol. 33 (2000) 225-235
    • (2000) J. Electron Technol. , vol.33 , pp. 225-235
    • Brynzari, V.1    Korotchenkov, G.2    Dmitriev, S.3
  • 25
    • 0035898906 scopus 로고    scopus 로고
    • Factors influencing the gas sensing characteristics of tin dioxide films deposited by spray pyrolysis: understanding and possibilities for control
    • Brinzari V., Korotcenkov G., and Golovanov V. Factors influencing the gas sensing characteristics of tin dioxide films deposited by spray pyrolysis: understanding and possibilities for control. Thin Solid Films 391 2 (2001) 167-175
    • (2001) Thin Solid Films , vol.391 , Issue.2 , pp. 167-175
    • Brinzari, V.1    Korotcenkov, G.2    Golovanov, V.3
  • 26
    • 33846575945 scopus 로고    scopus 로고
    • O.V. Krilov, V.F. Kisilev, Adsorption and Catalysis on Transition Metals and Their Oxides. Moscow, Chemistry, 1981, 288 pp. (in Russian).
  • 28
    • 0035875987 scopus 로고    scopus 로고
    • A temperature drop on exposure to reducing gases for various metal oxide thin films
    • Takada T., Mackawa T., and Dougami N. A temperature drop on exposure to reducing gases for various metal oxide thin films. Sens. Actuators B 77 (2001) 307-311
    • (2001) Sens. Actuators B , vol.77 , pp. 307-311
    • Takada, T.1    Mackawa, T.2    Dougami, N.3
  • 29
    • 0032157505 scopus 로고    scopus 로고
    • A new method for gas identification using a single semiconductor sensors
    • Takada T. A new method for gas identification using a single semiconductor sensors. Sens. Actuators B 52 (1998) 45-52
    • (1998) Sens. Actuators B , vol.52 , pp. 45-52
    • Takada, T.1
  • 30
    • 0002724505 scopus 로고
    • The pellistor catalytic gas sensor
    • Moseley P.T., and Tofield B.C. (Eds), Institute of Physics, Bristol
    • Jones E. The pellistor catalytic gas sensor. In: Moseley P.T., and Tofield B.C. (Eds). Solid-state Gas Sensors (1987), Institute of Physics, Bristol 17-31
    • (1987) Solid-state Gas Sensors , pp. 17-31
    • Jones, E.1
  • 31
    • 0026207784 scopus 로고
    • Detection and measurements of odour by sintered tin oxide
    • Fukui K. Detection and measurements of odour by sintered tin oxide. Sens. Actuators B 5 (1991) 27-32
    • (1991) Sens. Actuators B , vol.5 , pp. 27-32
    • Fukui, K.1
  • 32
    • 0029290152 scopus 로고
    • A study of tin-dioxide gas-sensors thermochemistry under conditions of varying oxygen partial pressure
    • Williams G., and Coles G.S.V. A study of tin-dioxide gas-sensors thermochemistry under conditions of varying oxygen partial pressure. Sens. Actuators B 24-25 (1995) 573-577
    • (1995) Sens. Actuators B , vol.24-25 , pp. 573-577
    • Williams, G.1    Coles, G.S.V.2
  • 34
    • 0025721593 scopus 로고
    • Selectivity studies of tin oxide based semiconductor gas sensors
    • Coles G.S.V., Williams G., and Smith B. Selectivity studies of tin oxide based semiconductor gas sensors. Sens. Actuators B 3 (1991) 7-14
    • (1991) Sens. Actuators B , vol.3 , pp. 7-14
    • Coles, G.S.V.1    Williams, G.2    Smith, B.3
  • 36
    • 0034276161 scopus 로고    scopus 로고
    • Development of modular ozone sensor system for application in practical use
    • Sauter D., Weimar U., Noetzel G., Mitrovics J., and Gopel W. Development of modular ozone sensor system for application in practical use. Sens. Actuators B 69 (2001) 1-9
    • (2001) Sens. Actuators B , vol.69 , pp. 1-9
    • Sauter, D.1    Weimar, U.2    Noetzel, G.3    Mitrovics, J.4    Gopel, W.5
  • 37
    • 0036289081 scopus 로고    scopus 로고
    • Modeling the response of tungsten oxide semiconductor as a gas sensor for the measurement of ozone
    • Williams D., Aliwell S.R., Pratt K.F.E., Caruana D.J., and Jones R.L. Modeling the response of tungsten oxide semiconductor as a gas sensor for the measurement of ozone. Meas. Sci. Technol. 3 (2002) 923-931
    • (2002) Meas. Sci. Technol. , vol.3 , pp. 923-931
    • Williams, D.1    Aliwell, S.R.2    Pratt, K.F.E.3    Caruana, D.J.4    Jones, R.L.5
  • 38
    • 33846647298 scopus 로고    scopus 로고
    • 4O sensor using ZnO. In: Proceedings of the 20th Chemical Sensor Symposium, April 3-4, 1995 The University of Tokyo. Report 13.
  • 42
    • 0037207605 scopus 로고    scopus 로고
    • Chemical Vapor Deposition of Coating
    • Choy K.L. Chemical Vapor Deposition of Coating. Progr. Mater. Sci. 48 2 (2003) 57-170
    • (2003) Progr. Mater. Sci. , vol.48 , Issue.2 , pp. 57-170
    • Choy, K.L.1
  • 43
    • 0033730591 scopus 로고    scopus 로고
    • Ceramic and film metal oxide sensors obtained by sol-gel method: structure features and gas-sensitive properties
    • Ivanovskaya M. Ceramic and film metal oxide sensors obtained by sol-gel method: structure features and gas-sensitive properties. J. Electron. Technol. 33 1-2 (2000) 108-112
    • (2000) J. Electron. Technol. , vol.33 , Issue.1-2 , pp. 108-112
    • Ivanovskaya, M.1
  • 46
    • 0004097212 scopus 로고
    • The theory of poisoning of catalytic flammable gas-sensing elements
    • Moseley P.T., and Tofield B.C. (Eds), Adam Hilger, Publ., Bristol
    • Gentry S.J., and Walsh P.T. The theory of poisoning of catalytic flammable gas-sensing elements. In: Moseley P.T., and Tofield B.C. (Eds). Solid State Gas Sensors (1987), Adam Hilger, Publ., Bristol 32-50
    • (1987) Solid State Gas Sensors , pp. 32-50
    • Gentry, S.J.1    Walsh, P.T.2
  • 47
    • 0020899764 scopus 로고
    • A comparison of metal oxide semiconductor and catalytic gas sensors
    • Gentry S.J., and Jones T.A. A comparison of metal oxide semiconductor and catalytic gas sensors. Sens. Actuators B 4 (1983) 581-586
    • (1983) Sens. Actuators B , vol.4 , pp. 581-586
    • Gentry, S.J.1    Jones, T.A.2
  • 48
    • 0031100316 scopus 로고    scopus 로고
    • Solid state gas sensors
    • Moseley P.T. Solid state gas sensors. Meas. Sci. Technol. 8 (1997) 223-232
    • (1997) Meas. Sci. Technol. , vol.8 , pp. 223-232
    • Moseley, P.T.1
  • 49
    • 33846650065 scopus 로고    scopus 로고
    • M. Ivanovskaya, P. Bogdanov, A. Gurlo, D. Orlik, Sol-gel technology for the production of ceramic and thin film gas sensors. In: Proceeding of the International Workshop "Results of Fundamental Research for Investment", IWRFRI'2000, May 29-31, 2000. St. Petersburg, Russia, pp. 93-94.
  • 50
    • 33846639942 scopus 로고    scopus 로고
    • M. Ivanovskaya, P. Bogdanov, A. Gurlo, D. Orlik, Application of metal oxide sensors for analysis of various gas surrounding. In: Proceeding of the Russian National Conference on Sensors, June 21-23, 2000. St. Petersburg, Russia, p. 53.
  • 51
    • 0000522503 scopus 로고    scopus 로고
    • Different thick-film methods in printing of one-electrode semiconductor gas sensors
    • Golovanov V., Solis J.L., Lantto V., and Leppävuori S. Different thick-film methods in printing of one-electrode semiconductor gas sensors. Sens. Actuators B 34 (1996) 401-406
    • (1996) Sens. Actuators B , vol.34 , pp. 401-406
    • Golovanov, V.1    Solis, J.L.2    Lantto, V.3    Leppävuori, S.4
  • 56
    • 33846583180 scopus 로고    scopus 로고
    • A. Kunimoto, K. Takahashi, Y. Nakanouchi, Hot wire type gas sensor of thin film tin oxide. In: Digest of the 10th Chemical Sensor Symposium, Kyoto University, April 5-7, 1990, Report 11.
  • 58
    • 50749132336 scopus 로고
    • A novel thick-film technique, gravure offset printing, for the realization of fine-line sensor structures
    • Leppavuori S., Vaananen J., Lahti M., Remes J., and Uusimaki A. A novel thick-film technique, gravure offset printing, for the realization of fine-line sensor structures. Sens. Actuators A 41-42 (1994) 593-596
    • (1994) Sens. Actuators A , vol.41-42 , pp. 593-596
    • Leppavuori, S.1    Vaananen, J.2    Lahti, M.3    Remes, J.4    Uusimaki, A.5
  • 60
    • 0242573426 scopus 로고    scopus 로고
    • 2 carbon monoxide sensors
    • 2 carbon monoxide sensors. Sens. Actuators B 96 1-2 (2003) 88-93
    • (2003) Sens. Actuators B , vol.96 , Issue.1-2 , pp. 88-93
    • Salehi, A.1
  • 61
    • 0041782600 scopus 로고    scopus 로고
    • Thick film device for the detection of NO and oxygen in exhaust gases
    • Magori E., Renhardt G., Fleischer M., Mayer R., and Meixner H. Thick film device for the detection of NO and oxygen in exhaust gases. Sens. Actuators B 95 1-3 (2003) 162-169
    • (2003) Sens. Actuators B , vol.95 , Issue.1-3 , pp. 162-169
    • Magori, E.1    Renhardt, G.2    Fleischer, M.3    Mayer, R.4    Meixner, H.5
  • 64
    • 24044511139 scopus 로고    scopus 로고
    • Application of membranes and filtering films for gas sensors improvements
    • Pijolat C., Viricelle J.P., Tournier G., and Montmeat P. Application of membranes and filtering films for gas sensors improvements. Thin Solid Films 490 1 (2005) 7-16
    • (2005) Thin Solid Films , vol.490 , Issue.1 , pp. 7-16
    • Pijolat, C.1    Viricelle, J.P.2    Tournier, G.3    Montmeat, P.4
  • 65
  • 68
    • 13144276370 scopus 로고    scopus 로고
    • 2 gas sensor with low power consumption
    • 2 gas sensor with low power consumption. Mater. Chem. Phys. 90 2-3 (2005) 250-254
    • (2005) Mater. Chem. Phys. , vol.90 , Issue.2-3 , pp. 250-254
    • Zhan, Z.1    Jiang, D.2    Xu, J.3
  • 69
    • 0038110879 scopus 로고    scopus 로고
    • Modification of metal oxide semiconductor gas sensor by electrophoretic deposition
    • Dougami N., and Takada T. Modification of metal oxide semiconductor gas sensor by electrophoretic deposition. Sens. Actuators B 93 1-3 (2003) 316-320
    • (2003) Sens. Actuators B , vol.93 , Issue.1-3 , pp. 316-320
    • Dougami, N.1    Takada, T.2
  • 72
    • 24144456991 scopus 로고    scopus 로고
    • Successive ionic layer deposition: possibilities for gas sensor applications
    • Korotcenkov G., Tolstoy V., Schwank J., and Boris I. Successive ionic layer deposition: possibilities for gas sensor applications. J. Phys.: Conference Ser. 15 (2005) 46-50
    • (2005) J. Phys.: Conference Ser. , vol.15 , pp. 46-50
    • Korotcenkov, G.1    Tolstoy, V.2    Schwank, J.3    Boris, I.4
  • 73
    • 0026208646 scopus 로고
    • New approaches to improvement semiconducting gas sensors
    • Yamazoe N. New approaches to improvement semiconducting gas sensors. Sens. Actuators B 5 (1991) 7-19
    • (1991) Sens. Actuators B , vol.5 , pp. 7-19
    • Yamazoe, N.1
  • 74
    • 0020828532 scopus 로고
    • Effects of additives on semiconductor gas sensors
    • Yamazoe N., Kurokawa Y., and Seiyama T. Effects of additives on semiconductor gas sensors. Sens. Actuators 4 (1983) 283-289
    • (1983) Sens. Actuators , vol.4 , pp. 283-289
    • Yamazoe, N.1    Kurokawa, Y.2    Seiyama, T.3
  • 76
    • 18644363071 scopus 로고    scopus 로고
    • Gas response control through structural and chemical modification of metal oxides: state of the art and approaches
    • Korotcenkov G. Gas response control through structural and chemical modification of metal oxides: state of the art and approaches. Sens. Actuators B 107 1 (2005) 209-232
    • (2005) Sens. Actuators B , vol.107 , Issue.1 , pp. 209-232
    • Korotcenkov, G.1
  • 78
    • 0000345370 scopus 로고    scopus 로고
    • 2 and their promoting effect on thermal stability ultrafine particles
    • 2 and their promoting effect on thermal stability ultrafine particles. J. Mater. Sci. 35 (2000) 917-923
    • (2000) J. Mater. Sci. , vol.35 , pp. 917-923
    • Yang, G.1    Haibo, Z.2    Biying, Z.3
  • 79
    • 0035443111 scopus 로고    scopus 로고
    • Nanoparticle engineering and control of tin oxide microstructure for chemical microsensor applications
    • Panchapakesan B., de Voe D.L., Widmaier M.R., Cavicchi R., and Semancik S. Nanoparticle engineering and control of tin oxide microstructure for chemical microsensor applications. Nanotechnology 12 (2001) 336-349
    • (2001) Nanotechnology , vol.12 , pp. 336-349
    • Panchapakesan, B.1    de Voe, D.L.2    Widmaier, M.R.3    Cavicchi, R.4    Semancik, S.5
  • 80
    • 0026207784 scopus 로고
    • Detection and measurements of odor by sintered tin oxide
    • Fukui K. Detection and measurements of odor by sintered tin oxide. Sens. Actuators B 5 (1991) 27-32
    • (1991) Sens. Actuators B , vol.5 , pp. 27-32
    • Fukui, K.1
  • 82
    • 0033690359 scopus 로고    scopus 로고
    • 4 gas sensor with low power consumption
    • 4 gas sensor with low power consumption. Sens. Actuators B 66 1-3 (2000) 289-292
    • (2000) Sens. Actuators B , vol.66 , Issue.1-3 , pp. 289-292
    • Sun, L.1    Qiu, F.2    Quan, B.3
  • 85
    • 33846629791 scopus 로고    scopus 로고
    • 3-based gas sensors. Sensors and Transducers e-Digest (www.sensorportable.com). IFSA, N 3 December 2000.
  • 86
    • 33846587760 scopus 로고    scopus 로고
    • 3 structure by sol-gel method and property of semiconductor gas sensors on its base. Proceedings of the National Academy of Sciences of Belarus N1, 2003, pp. 37-41.
  • 87
    • 33846644309 scopus 로고    scopus 로고
    • S.N. Malchenko, G.F. Karkotsky, N.S. Malchenko, A.I. Rat'ko, Increasing one-electrode gas sensor selectivity. Proceedings of the National Academy of Sciences of Belarus. N3, 2000, pp. 38-43.
  • 92
    • 0030257109 scopus 로고    scopus 로고
    • A silicon micromachined conductometric gas sensor with a maskless Pt sensing film deposited by selected-area CVD
    • Majoo S., Gland J.L., Wise K.D., and Schwank J.W. A silicon micromachined conductometric gas sensor with a maskless Pt sensing film deposited by selected-area CVD. Sens. Actuators A 35-36 (1996) 312-319
    • (1996) Sens. Actuators A , vol.35-36 , pp. 312-319
    • Majoo, S.1    Gland, J.L.2    Wise, K.D.3    Schwank, J.W.4
  • 93
    • 0036645818 scopus 로고    scopus 로고
    • Materials and processing for realization of micro-hotplates operated at elevated temperatures
    • Furjes P., Vizvary Zs., Adam M., Barsony I., Morrissey A., and Dusco Cs. Materials and processing for realization of micro-hotplates operated at elevated temperatures. J. Micromech. Microeng. 12 (2002) 425-429
    • (2002) J. Micromech. Microeng. , vol.12 , pp. 425-429
    • Furjes, P.1    Vizvary, Zs.2    Adam, M.3    Barsony, I.4    Morrissey, A.5    Dusco, Cs.6
  • 94
    • 0032158213 scopus 로고    scopus 로고
    • Battery operated semiconductor CO sensor using pulse heating method
    • Nomura T., Fujimori Y., Kitora M., Matsuura Y., and Aso I. Battery operated semiconductor CO sensor using pulse heating method. Sens. Actuators B 52 1-2 (1998) 90-95
    • (1998) Sens. Actuators B , vol.52 , Issue.1-2 , pp. 90-95
    • Nomura, T.1    Fujimori, Y.2    Kitora, M.3    Matsuura, Y.4    Aso, I.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.