Analytical study of resistive MEM gas flow meters

Microsystem Technologies

Volumn 14, Issue 1, 2008, Pages 89-94

  Abbaspour Sani, Ebrahim ^a   Javan, Darioush ^a  

^a URMIA UNIVERSITY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MEMS; MICROMACHINING; SILICON COMPOUNDS; SUBSTRATES; TEMPERATURE SENSORS;

GAS FLOW VELOCITY; MICROMACHINED CAVITY; SENSING ELEMENTS; SENSING ELEMENTS SEPARATION;

GAS METERS;

EID: 34547850683     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0403-4     Document Type: Article

References (6)

1. Ashauer M, Glosch H, Hedrich F, Hey N, Sandmaier H, Lang W (1999) Thermal flow sensor for liquids and gases based on combinations of two principles. Sens Actuators A 73(1-2):7-13
2. Elwenspoek M (1999) Thermal flow micro sensors. CAS 99 (2):423-425
3. Incropera FP, Witt DP (1996) Fundamentals of heat and mass transfer, 4th edn. Wiley, New York
4. Komiya K, Higuchi F, Ohtani K (1988) Characteristics of a thermal gas flowmeter. Rev Sci Instrument 59:477
5. Lammerink T, Elwenspoek N, Fluitman RM (1993) Micro-liquid flow sensor. Sens Actuators A37-A38:45-50
6. Morikawa T, Nonomura Y, Tsukuda K (1993) 3-Dimentsional piezorsistive FEM analysis of a new combustion pressure sensor. In: Transducers '93