A static turbine flow meter with a micromachined silicon torque sensor

Journal of Microelectromechanical Systems

Volumn 12, Issue 6, 2003, Pages 937-946

  Svedin, Niklas ^a   Stemme, Erik ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Flow sensor; Piezoresistive; Torque

Indexed keywords

FLOW MEASUREMENT; FLOW OF FLUIDS; GAS TURBINES; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; POLYSILICON; SENSORS; SILICON; STIFFNESS; STRAIN GAGES; TORQUE;

MICROMACHINED SILICON TORQUE SENSOR; STATIC TURBINE FLOW METER;

FLOWMETERS;

EID: 0742269315     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.820271     Document Type: Article

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