Novel fabrication method for surface micromachined thin single-crystal silicon cantilever beams

Journal of Microelectromechanical Systems

Volumn 12, Issue 2, 2003, Pages 185-192

  Gupta, Amit ^a   Denton, John P ^a   McNally, Helen ^a   Bashir, Rashid ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Cantilever beam; Chemical mechanical polishing (CMP); Merged epitaxial lateral overgrowth; Silicon on insulator (SOI)

Indexed keywords

CHEMICAL MECHANICAL POLISHING; MICROMACHINING; NATURAL FREQUENCIES; SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

MERGED EPITAXIAL LATERAL OVERGROWTH (MELO);

CANTILEVER BEAMS;

EID: 0344950324     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.809974     Document Type: Article

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