MEMS-based formaldehyde gas sensor integrated with a micro-hotplate

Microsystem Technologies

Volumn 12, Issue 10-11, 2006, Pages 893-898

  Lee, Chia Yen ^a   Hsieh, Ping Ru ^a   Lin, Che Hsin ^b   Chou, Po Cheng ^c   Fu, Lung Ming ^d   Chiang, Che Ming ^e  

^a DA YEH UNIVERSITY   (Taiwan)

^b NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

^c SHU TE UNIVERSITY   (Taiwan)

^d NATIONAL PINGTUNG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^e NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; FORMALDEHYDE; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; QUARTZ; SPUTTERING; THIN FILMS;

FORMALDEHYDE-SENSING LAYER; INTER-DIGITATED ELECTRODES; MICRO-HOTPLATE; PT HEATING RESISTORS;

CHEMICAL SENSORS;

EID: 33747620879     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0119-x     Document Type: Conference Paper

References (13)

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