Anemometer with hot platinum thin film

Sensors and Actuators, A: Physical

Volumn 94, Issue 1-2, 2001, Pages 32-38

  Mailly, F ^a   Giani, A ^a   Bonnot, R ^a   Temple Boyer, P ^b   Pascal Delannoy, F ^a   Foucaran, A ^a   Boyer, A ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

^b LAAS CNRS   (France)

Author keywords

Flow measurement; Membrane; Platinum heater; Thermal sensor

Indexed keywords

ADHESION; ANEMOMETERS; DEPOSITION; ELECTRIC POWER UTILIZATION; ELECTRON BEAMS; HIGH TEMPERATURE EFFECTS; LAMINAR FLOW; MICROMACHINING; PLATINUM; RESISTORS; SENSITIVITY ANALYSIS; SILICON NITRIDE; THIN FILMS; TURBULENT FLOW;

ELECTRIC CONSUMPTION;

MICROSENSORS;

EID: 0035980336     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00668-9     Document Type: Article

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