Probing technique using circular motion of a microsphere controlled by optical pressure for a nanocoordinate measuring machine

Applied Optics

Volumn 48, Issue 2, 2009, Pages 198-205

  Michihata, Masaki ^a   Nagasaka, Yuto ^a   Hayashi, Terutake ^a   Takaya, Yasuhiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSPHERES; SPHERES;

CIRCULAR MOTION; CIRCULAR ORBIT; MEASURING MACHINES; MEASURING SYSTEMS; MINOR AXIS LENGTHS; OPTICAL PRESSURE; POSITION DETECTION; PROBING TECHNIQUES;

PROBES;

EID: 60849107320     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.48.000198     Document Type: Article

References (40)

1. H. N. Hansen, K. Carneiro, H. Haitjema, and L. De Chíffre, "Dimensional microand nano-metrology," CIRP Annals 55, 721-743 (2006).
2. T. P. Feifer, R. Freudenberg, G. Dussler, and B. Brocher, "Quality control and process observation for the micro assembly process," Measurement 30, 1 (2001).
3. R. Leach, J. Haycocks, K. Jackson, A. Lewis, S. Oldfield, and A. Yacoot, "Advances in traceable nanometrology at the National Physical Laboratory," Nanotechnology 12, R1-R6 (2001).
4. U. Brand and J. Kirchhoff, "A micro-CMM with metrology frame for low uncertainty measurements," Meas. Sci. Technol. 16, 2489-2497 (2005).
5. M. M. P. A. Vermeulen, P. C. J. N. Rosielle, P. H. J. Schellekens, "Design of a high-precision 3D-coordinate measuring machine," CIRP Annals 47, 447-450 (1998).
6. A. Kung, F. Meli, and R. Thalmann, "Ultraprecision micro-CMM using a low force 3D touch probe," Meas. Sci. Technol. 18, 319-327 (2007).
7. M. Michihata, Y. Takaya, and T. Hayashi, "Development of the nano-probe system based on the laser trapping technique," CIRP Annals 57, 493-496 (2008).
8. S. W. Kim, "New design of precision CMM based upon volumetric phase-measuring interferometry," CIRP Annals 50, 357-360 (2001).
9. M. Gruhlke and H. Rothe, "Combining coordinate measurement and nanometrology for large-range nanoscale metrology," Proc. SPIE 6648, 664801 (2007).
10. S. Cao, U. Brand, T. Kleine-Besten, W. Hoffmann, H. Schwenke, S. Butefischa, and S. Buttgenbach, "Recent developments in dimensional metrology for microsystem components," Microsystem Technologies 8, 3-6 (2002).
11. H. Schwenke, F. Hartig, K. Wendt, and F. Waldele, "Future challenges in coordinate metrology: addressing metrological problems for very small and very large parts," presented at the International Display Workshop, Knoxville, Tennessee, 7-10 May 2001.
12. Y. Takaya, S. Takahashi, and T. Miyoshi, "Development of the nano-CMM probe based on laser trapping technology," CIRP Annals 48, 421-424 (1999).
13. A. Weckenmann, T. Estler, G. Peggs, and D. McMurtry, "Probing systems in dimensional metrology," CIRP Annals 53, 657-684 (2004).
14. A. Weckenmann, G. N. Peggs, and J. Hoffmann, "Probing systems for dimensional microand nano-metrology," Meas. Sci. Technol. 17, 504-509 (2006).
15. IBS Precision Engineering: http://www.ibspe.com/.
16. G. N. Peggs, A. J. Lewis, and S. Oldfield, "Design for a compact high-accuracy CMM," CIRP Annals 48, 417-420 (1999).
17. H. Haitjema, W. O. Pri, and P. H. J. Schellekens, "Development of a silicon-based nanoprobe system for 3-D measurements," CIRP Annals 50, 365-368 (2001).
18. H. Schwenke, F. Waldele, C. Weiskirch, and H. Kunzmann, "Opto-tactile sensor for 2D and 3D measurement of small structures on coordinate measuring machines," CIRP Annals 50, 361-364 (2001).
19. F. Meli, M. Fracheboud, S. Bottinelli, M. Bieri, R. Thalmann, J. M. Breguet, and R. Clavel, "High precision, low force 3D touch probe for measurements on small objects," in EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment 2003. Proceedings. Vol. 2, M. Weck, ed. (Voerde, 2003), pp. 411-414.
20. K.Hidaka, "Study of a small-sized ultrasonic probe," CIRP Annals 55, 567-570 (2006).
21. ISO 10360-1 (2000).
22. A. Ashkin, "Acceleration and trapping of particles by radiation pressure," Phys. Rev. Lett. 24, 156-159 (1970).
23. A. Ashkin, "Optical trapping and manipulation of neutral particles using lasers," Proc. Natl. Acad. Sci. 94, 4853-4860 (1997).
24. R. C. Gauthier, R. N. Tait, H. Mende, and C. Pawlowicz, "Optical selection, manipulation, trapping, and activation of a microgear structure for applications in micro-optical-electromechanical systems," Appl. Opt. 40, 930-937 (2001).
25. M. P. MacDonald, L. Paterson, W.Sibbett, K. Dholakia, and P. E. Bryant, "Trapping and manipulation of low-index particles in a two-dimensional interferometric optical trap," Opt. Lett. 26, 863-865 (2001).
26. E. L. Florin, A. Pralle, J. K. H. Hörber, and E. H. K. Stelzer, "Photonic force microscope based on optical tweezers and twophoton excitation for biological applications," J. Struct. Biol. 119, 202-211 (1997).
27. L. P. Ghislain and W.W. Webb, "Scanning-force microscope based on an optical trap," Opt. Lett. 18, 1678-1680 (1993).
28. M. E. J. Friese, A. G Truscott, H. Rubinsztein-Dunlop, and N. R. Heckenberg, "Three-dimensional imaging with optical tweezers," Appl. Opt. 38, 6597-6603 (1999).
29. M. Seryab, P. Jakl, J. JeZek, A. Jonas, P. Zemtnek, and M. Liska, "The use of an optically trapped microprobe for scanning details of surface," Proc. SPIE 5259, 166-169 (2003).
30. Y. Takaya, H. Shimizu, S. Takahashi, and T. Miyoshi, "Fundamental study on the new probe technique for the nano-CMM based on laser trapping and a mirau interferometer," Measurement 25, 9-18 (1999).
31. A. Ashkin, J. M. Dziedzic, J. E. Bjorkholm, and S. Chu, "Observation of a single-beam gradient force optical trap for dielectric particles," Opt. Lett. 11, 288-290 (1986).
32. A. Ashkin, "Forces of a single-beam gradient laser trap on a dielectric sphere in the ray optics regime," Biophys. J. 61, 569-582 (1992).
33. W. H. Wright, G. J. Sonek, and M. W. Berns, "Parametric study of the forces on microspheres held by optical tweezers," Appl. Opt. 33, 1735-1748 (1994).
34. Y. Takaya, K. Imai, S. Dejima, and T. Miyoshi, "Nano-position sensing using optically motion-controlled microprobe with PSD based on the laser trapping technique," CIRP Annals 54, 467-470 (2005).
35. Y. Takaya, K. Imai, S. Dejima, and T. Miyoshi, "Dynamic properties measurement of vibrating microprobe for nano-position sensing using radiation pressure control," Proc. SPIE 5930, 223-230 (2005).
36. M. E. J. Friese, A. G. Truscott, H. R. Dunlop, and N. R. Heckenberg, "Determination of the force constant of a singlebeam gradient trap by measurement of backscattered light," Appl. Opt. 35, 7112-7116 (1996).
37. Z. Ding, G. Lai, T. Sakakibara, and S. Shinohara, "Determination of the spring constant of an optical trap by external sinusoidal excitation and lock-in detection," J. Appl. Phys. 88, 737-741 (2000).
38. K. Berg-Sørensen and H. Flyvbjerg, "Power spectrum analysis for optical tweezers," Rev. Sci. Instrum. 75, 594-612 (2004).
39. J. Happel and H. Brenner, Low Reynolds Number Hydrodynamics: With Special Applications to Particulate Media (Springer, 1983).
40. R. Omori, T. Kobayashi, and A. Suzuki, "Observation of a single-beam gradient-force optical trap for dielectric particles in air, " Opt. Lett. 22, 816-818 (1997).