Advances in traceable nanometrology at the National Physical Laboratory

Nanotechnology

Volumn 12, Issue 1, 2001, Pages

  Leach, R ^a   Haycocks, J ^a   Jackson, K ^a   Lewis, A ^a   Oldfield, S ^a   Yacoot, A ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; GLASS; INTERFEROMETERS; INTERFEROMETRY; OPTICAL VARIABLES MEASUREMENT; TEXTURES; TRANSDUCERS; X RAY ANALYSIS;

TRACEABLE NANOMETROLOGY;

NANOTECHNOLOGY;

EID: 0035279958     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/12/1/201     Document Type: Article

References (22)

1. Combined optical and x-ray interferometry for high-precision dimensional metrology
2. Optical fringe subdivision with nanometric accuracy
3. Low-cost testing of profilometer stylus forces
4. Verification of a polarization-insensitive optical interferometer system with subnanometric capability
5. Verification of the subnanometric capability of an NPL differential plane mirror interferometer with a capacitance probe Meas
6. There's plenty of room at the bottom
7. Nanometric surface metrology at the National Physical Laboratory
8. Standards for the calibration of SPMs: Design-traceability-calibration-application
9. Technology transfer in the development of a nanotopographic instrument
10. Determination and correction of quadrature fringe measurement errors in interferometers
11. Comparison of indentor tip shape measurements using a calibrated AFM and indentation into fused silica
12. Depth sensing indentation of thin hard films: A study of modulus measurement sensitivity to indentation parameters
13. Calibration, traceability and uncertainty issues in surface texture metrology
14. Telling the rough from the smooth
15. Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV
16. Sub-nanometre surface texture and profile measurement with NANOSURF 2
17. Calibration of frictional forces in atomic force microscopy
18. Design for a compact high-accuracy CMM
19. A precision low-force balance and its application to atomic force microscope probe calibration
20. The engineered surface - Its development and relevance in modern day engineering
21. The use of x-ray interferometry to investigate the linearity of the NPL differential plane mirror optical interferometer Meas