Probing systems for dimensional micro- and nano-metrology

Measurement Science and Technology

Volumn 17, Issue 3, 2006, Pages 504-509

  Weckenmann, A ^a   Peggs, G ^b   Hoffmann, J ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Coordinate metrology; Microtechnology; Nanotechnology; Probing systems

Indexed keywords

CALIBRATION; LINEAR SYSTEMS; MEASUREMENTS; MINIATURE INSTRUMENTS; NANOTECHNOLOGY; OPTICAL MICROSCOPY; QUALITY CONTROL; SCANNING ELECTRON MICROSCOPY;

COORDINATE METROLOGY; MICROTECHNOLOGY; PROBING SYSTEMS; SCANNING PROBE MICROSCOPY;

PROBES;

CALIBRATION; LINEAR SYSTEMS; MEASUREMENTS; MINIATURE INSTRUMENTS; NANOTECHNOLOGY; OPTICAL MICROSCOPY; PROBES; QUALITY CONTROL; SCANNING ELECTRON MICROSCOPY;

EID: 31644449023     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/3/S08     Document Type: Article

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