Development of the nano-probe system based on the laser-trapping technique

CIRP Annals - Manufacturing Technology

Volumn 57, Issue 1, 2008, Pages 493-496

  Michihata, M ^a   Takaya, Y ^a   Hayashi, T ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Coordinate measuring machine (CMM); Microstructure; Probe

Indexed keywords

LASER APPLICATIONS; MEASUREMENT THEORY; MICROSTRUCTURE; UNCERTAINTY ANALYSIS;

LASER TRAPPING TECHNIQUE; NANO SENSING PROBE;

COORDINATE MEASURING MACHINES;

EID: 43649088471     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2008.03.016     Document Type: Article

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