A micro-CMM with metrology frame for low uncertainty measurements

Measurement Science and Technology

Volumn 16, Issue 12, 2005, Pages 2489-2497

  Brand, Uwe ^a   Kirchhoff, Juergen ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Dimensional measurements; Equation of motion; Fibre probe; Metrology frame, micro metrology; Micro CMM; Thermal drift; Uncertainty budget

Indexed keywords

EQUATIONS OF MOTION; INTERFEROMETERS; MEASUREMENTS; MICROSTRUCTURE; MIRRORS; OPTICAL FIBERS;

COORDINATE MEASURING MACHINE (CMM); DIMENSIONAL MEASUREMENTS; FIBER PROBE; THERMAL DRIFT; UNCERTAINTY BUDGET;

PROBES;

MEASURING INSTRUMENT;

EID: 27844438958     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/16/12/013     Document Type: Article

References (9)

1. Isara 3D-CMM from IBS Precision Engineering bv, Esp 201, NL-5633 AD Eindhoven, Netherlands
2. F25 3D-CMM from Carl Zeiss Industrielle Messtechnik GmbH, 73446 Oberkochen, Germany
3. NMM1 Nano Positioning and Nano-Measuring-Machine from SIOS Messtechnik GmbH, Am Vogelherd 46, D-98693 Ilmenau, Germany
4. UMAP, Vision System Hyper 302-hybrid vision/touchprobe measuring machine from Mitutoyo, West Point Business Park, Andover, Hampshire, SP10 3UX, UK
5. Brand U, Kleine-Besten T and Schwenke H 2000 Development of a special CMM for dimensional metrology on microsystem components Proc. ASPE Conf. (Scottsdale, AZ) 542-6
6. IP400 Video Check Coordinate Measuring Machine from Werth Messtechnik GmbH, Siemensstr. 19, 35394 Gießen, Germany
7. SP 500 D miniature plane mirror interferometer for simultaneous measurement of path and angle from SIOS Messtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany
8. Ji G, Schwenke H and Trapet E 1998 Opto-tactile sensor for measuring small structures on coordinate measuring machines Proc. ASPE Ann. Meeting pp 25-8
9. Brand U, Yu L, Chang C, Luellmann H and Schwenke H 2002 Beginning of operation and optimisation of a 3D micro measuring device Proc. Euspen Int. Topical Conf. (Eindhoven) pp 561-4