Dynamic properties measurement of vibrating microprobe for nano-position sensing using radiation pressure control

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5930, Issue , 2005, Pages 1-8

  Takaya, Yasuhiro ^a   Imai, Keijiro ^a   Dejima, Shuichi ^a   Miyoshi, Takashi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Laser trapping; Microcomponent; Nano CMM; Position sensing; Probe; Vibrating microsphere; Viscous drag coefficient

Indexed keywords

DRAG; FREQUENCIES; LASER APPLICATIONS; NANOTECHNOLOGY; SENSORS; TRACKING (POSITION); VISCOSITY;

LASER TRAPPING; MICROCOMPONENTS; POSITION SENSING; PROBE; VIBRATING MICROSPHERES;

LATTICE VIBRATIONS;

EID: 31844436363     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.619212     Document Type: Conference Paper

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