Combining coordinate measurement and nanometrology for range nanoscale metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6648, Issue , 2007, Pages

  Gruhlke, Martin ^a   Rothe, Hendrik ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

AFM; Controller setting; Coordinate measurement; Nanometrology; Temperature; Traceability

Indexed keywords

ATOMIC FORCE MICROSCOPY; OPTICAL RESOLVING POWER; OPTICAL SENSORS; THERMAL EXPANSION;

COORDINATE MEASUREMENT; NANOMETROLOGY; POSITIONING SYSTEM;

OPTICAL SYSTEMS;

EID: 42149191948     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.733527     Document Type: Conference Paper

References (21)

1. A. Weckenmann, G. Peggs and J. Hoffmann, "Probing systems for dimensional micro- and nano-metrology", Meas. Sci. Technol., 17 (2006), 504 - 509, 2006
2. A. Küng, F. Meli and R. Thalmann, "Ultraprecision micro-CMM using a low force 3D touch probe", 18 (2007), 319 -327, 2007
3. T. Dziomba, L. Koenders and G. Wilkening, "Standardization in dimensional nanometrology: development of a calibration guideline for Scanning Probe Microscopy", SPIEEurope Optical Fabrication, Testing, and Metrology II, A. Duparré, R. Geyl and L. Wang, 5965, SPIE, 2005
4. R. Petersen, Theoretische und experimentelle Untersuchungen zur Koordinatenmesstechnik in der Nanometrologie, Shaker Verlag, Aachen, 2004
5. H. Rothe, M. Gruhlke and R. Petersen, "Nanometrology in Two and a Half Dimensions - Development of a Nanometer Coordinate Measuring Machine with Atomic Force Scanning", Technisches Messen, 9/2006, 511-521, 2006
6. SIOS Meßtechnik GmbH: Nano Positioning and Nano Measuring Machine, User Manual, 2006
7. T. Hausotte, Nanopositionier- und Nanomessmaschine, Verlag ISLE, Ilmenau, 2002
8. th Seminar on Quantitative Microscopy: Dimensional measurements in the micro and nanometer range, K. Hasche, W. Mirandé and G. Wilkening, vol. PTB-F-39 of PTB-Bericht, Jan. 2000
9. SIOS Meßtechnik GmbH, Am Vogelherd 46, 98693 Ilmenau, Germany, http://www.sios.de
10. Surface Imaging Systems, UltraObjective, User Manual, S.I.S. Rastersonden- und Sensormeßtechnik GmbH
11. S.I.S. Rastersonden- und Sensormeßtechnik GmbH, Kaiserstraße 100, 52134 Herzogenrath, Germany, http://www.sis-gmbh.com
12. POG Präzisionsoptik Gery GmbH, Keplerstraße 35, 07549 Gera, Germany, http://www.precisionoptic.com
13. R. Petersen and H. Rothe, "A milestone in nanometrology: Large area AFM-scans with the Nanometer Coordinate Measuring Machine (NCMM)", Euspen International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment, M. Week and H. Kunzmann, 2, Aachen, 2003
14. D. Hüser, Untersuchungen zurKoordinatenmesstechnik für Mïkrosysteme in zweieinhalb Dimensionen, Shaker Verlag, Aachen, 2005
15. H. Rothe, "Multivariate estimation of the systematic error of scanning probe microscopes", Thin Solid Films, 264, 282 - 290, 1995
16. G. Jäger, E. Manské, T. Hausotte et. al., "Taktile und optische Sensorsysteme für Nanomess- und Nanopositioniermaschinen", Messtechnik fùr Mikro- und Nano-Engineering, A. Weckenmann, 1950, 55 - 65, vdiverlag, Düsseldorf, 2006
17. D. Hüser, R. Petersen and H. Rothe, "Coordinate Measurement in Microsystems by using AFM-probing: Problems and Solutions", Nanoscale Calibration Standards and Methods, G. Wilkening and L. Koenders, 60 - 72, Wiley-VCH Verlag, Weinheim, 2005
18. H. Mann, H. Schiffelgen and R. Froriep, Einßhrung in die Regelungstechnik, 197 - 200, Carl Hanser Verlag, Munich, 1997
19. H. Lutz and W. Wendt, Taschenbuch der Regelungstechnik, 433 - 439, Verlag Harri Deutsch, Frankfurt a. M., 2003
20. Verein Deutscher Ingenieure (edt.), Determination of geometrical quantities by using of Scanning Probe Microscopes - Calibration of measzrement systems, VDI/VDE-Richtlinie 2656 Blatt 1, vdi-verlag, Düsseldorf, to be published
21. Guide to the Expression of Uncertainty in Measurements (GUM), BSI, London, 1995