SCOPUS 정보 검색 플랫폼

Applied Physics Express

Volumn 1, Issue 4, 2008, Pages 0470011-0470013

Enhancement of acid production in chemically amplified resist for extreme ultraviolet lithography

(6) Yamamoto, Hiroki a Kozawa, Takahiro a Tagawa, Seiichi a Yukawa, Hiroto b Sato, Mitsuru b Onodera, Junichi b

a OSAKA UNIVERSITY (Japan)

b TOKYO OHKA KOGYO CO LTD (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ATOMIC PHYSICS; ATOMIC SPECTROSCOPY; ATOMS; ELECTRON BEAM LITHOGRAPHY; FLUORINE; LASER PULSES; MULTIPHOTON PROCESSES; PHOTORESISTORS; PHOTORESISTS; POLYMERS; ROUGHNESS MEASUREMENT; ULTRAVIOLET DEVICES;

AB SORPTION COEFFICIENTS; ACID GENERATION EFFICIENCIES; ACID GENERATIONS; ACID GENERATORS; ACID PRODUCTIONS; CHEMICALLY AMPLIFIED RESISTS; ENERGY ELECTRONS; EUV RESISTS; EXTREME ULTRAVIOLETS; FLUORINATED COMPOUNDS; FLUORINE ATOMS; LINE EDGE ROUGHNESSES; PER UNIT VOLUMES; POLYMER ABSORPTIONS; SECONDARY ELECTRONS; SPECTROSCOPIC METHODS;

ACIDS;

EID: 57049184187 PISSN: 18820778 EISSN: 18820786 Source Type: Journal
DOI: 10.1143/APEX.1.047001 Document Type: Article

Times cited : (19)

References (29)

1
- 0343007082
- W. Hinsberg, F. A. Houle, J. Hoffnagle, M. Sanchez, G. Wallraff, M. Morrison, and S. Frank: J. Vac. Sci. Technol. B 16 (1998) 3689.
- (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3689
- Hinsberg, W.¹ Houle, F.A.² Hoffnagle, J.³ Sanchez, M.⁴ Wallraff, G.⁵ Morrison, M.⁶ Frank, S.⁷

2
- 33745617811
- S. C. Palmateer, S. G. Cann, J. E. Curtin, S. P. Doran, L. M. Eriksen, A. R. Forte, R. R. Kunz, T. M. Lyszczarz, M. B. Stern, and C. M. Nelson-Thomas: Proc. SPIE 3333 (1998) 634.
- (1998) Proc. SPIE , vol.3333 , pp. 634
- Palmateer, S.C.¹ Cann, S.G.² Curtin, J.E.³ Doran, S.P.⁴ Eriksen, L.M.⁵ Forte, A.R.⁶ Kunz, R.R.⁷ Lyszczarz, T.M.⁸ Stern, M.B.⁹ Nelson-Thomas, C.M.¹⁰

3
- 24644487409
- G. W. Reynolds and J. W. Taylor: J. Vac. Sci. Technol. B 17 (1999) 334.
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 334
- Reynolds, G.W.¹ Taylor, J.W.²

4
- 0035519476
- J. Shin, G. Han, Y. Ma, K. Moloni, and F. Cerrina: J. Vac. Sci. Technol. B 19 (2001) 2890.
- (2001) J. Vac. Sci. Technol. B , vol.19 , pp. 2890
- Shin, J.¹ Han, G.² Ma, Y.³ Moloni, K.⁴ Cerrina, F.⁵

5
- 29044442383
- T. Kozawa, H. Yamamoto, A. Saeki, and S. Tagawa: J. Vac. Sci. Technol. B 23 (2005) 2716.
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 2716
- Kozawa, T.¹ Yamamoto, H.² Saeki, A.³ Tagawa, S.⁴

6
- 33645669462
- A. Saeki, T. Kozawa, S. Tagawa, and H. B. Cao: Nanotechnology 17 (2006) 1543.
- (2006) Nanotechnology , vol.17 , pp. 1543
- Saeki, A.¹ Kozawa, T.² Tagawa, S.³ Cao, H.B.⁴

7
- 34648826796
- H. Yamamoto, T. Kozawa, A. Saeki, K. Okamoto, S. Tagawa, K. Ohmori, M. Sato, and H. Komano: Jpn. J. Appl. Phys. 46 (2007) 6187.
- (2007) Jpn. J. Appl. Phys , vol.46 , pp. 6187
- Yamamoto, H.¹ Kozawa, T.² Saeki, A.³ Okamoto, K.⁴ Tagawa, S.⁵ Ohmori, K.⁶ Sato, M.⁷ Komano, H.⁸

8
- 25144499519
- G. M. Gallatin: Proc. SPIE 5754 (2004) 38.
- (2004) Proc. SPIE , vol.5754 , pp. 38
- Gallatin, G.M.¹

9
- 0026981750
- T. Kozawa, Y. Yoshida, M. Uesaka, and S. Tagawa: Jpn. J. Appl. Phys. 31 (1992) 4301.
- (1992) Jpn. J. Appl. Phys , vol.31 , pp. 4301
- Kozawa, T.¹ Yoshida, Y.² Uesaka, M.³ Tagawa, S.⁴

10
- 0000710674
- T. Kozawa, S. Nagahara, Y. Yoshida, and S. Tagawa: J. Vac. Sci. Technol. B 15 (1997) 2582.
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2582
- Kozawa, T.¹ Nagahara, S.² Yoshida, Y.³ Tagawa, S.⁴

11
- 0942289187
- T. Kozawa, A. Saeki, A. Nakano, Y. Yoshida, and S. Tagawa: J. Vac. Sci. Technol. B 21 (2003) 3149.
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 3149
- Kozawa, T.¹ Saeki, A.² Nakano, A.³ Yoshida, Y.⁴ Tagawa, S.⁵

12
- 33745125054
- A. Nakano, T. Kozawa. S. Tagawa, T. Szreder, J. F. Wishart, T. Kai, and T. Shimokawa: Jpn. J. Appl. Phys. 45 (2006) L197.
- (2006) Jpn. J. Appl. Phys , vol.45
- Nakano, A.¹ Kozawa, T.² Tagawa, S.³ Szreder, T.⁴ Wishart, J.F.⁵ Kai, T.⁶ Shimokawa, T.⁷

13
- 33845240818
- T. Kozawa, S. Tagawa, H. Oizumi, and I. Nishiyama: J. Vac. Sci. Technol. B 24 (2006) L27.
- (2006) J. Vac. Sci. Technol. B , vol.24
- Kozawa, T.¹ Tagawa, S.² Oizumi, H.³ Nishiyama, I.⁴

14
- 34547837992
- H. Yamamoto, T. Kozawa, S. Tagawa, H. B. Cao, H. Deng, and M. J. Leeson: Jpn. J. Appl. Phys. 46 (2007) L142.
- (2007) Jpn. J. Appl. Phys , vol.46
- Yamamoto, H.¹ Kozawa, T.² Tagawa, S.³ Cao, H.B.⁴ Deng, H.⁵ Leeson, M.J.⁶

15
- 0036614041
- T. Kozawa, A. Saeki, Y. Yoshida, and S. Tagawa: Jpn. J. Appl. Phys. 41 (2002) 4208.
- (2002) Jpn. J. Appl. Phys , vol.41 , pp. 4208
- Kozawa, T.¹ Saeki, A.² Yoshida, Y.³ Tagawa, S.⁴

16
- 13244273811
- T. Kozawa, A. Saeki, and S. Tagawa: J. Vac. Sci. Technol. B 22 (2004) 3489.
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 3489
- Kozawa, T.¹ Saeki, A.² Tagawa, S.³

17
- 33645244137
- T. Kozawa and S. Tagawa: J. Appl. Phys. 99 (2006) 054509.
- (2006) J. Appl. Phys , vol.99 , pp. 054509
- Kozawa, T.¹ Tagawa, S.²

18
- 0004932883
- B. L. Henke, E. M. Gullikson, and J. C. Davis: At. Data Nucl. Data Tables 54 (1993) 181.
- (1993) At. Data Nucl. Data Tables , vol.54 , pp. 181
- Henke, B.L.¹ Gullikson, E.M.² Davis, J.C.³

19
- 0018542534
- D. J. Webb and M. Hatzakis: J. Vac. Sci. Technol. 16 (1979) 2008.
- (1979) J. Vac. Sci. Technol , vol.16 , pp. 2008
- Webb, D.J.¹ Hatzakis, M.²

20
- 34547842326
- H. Yamamoto, T. Kozawa, S. Tagawa, K. Ohmori, M. Sato, and H. Komano: Jpn. J. Appl. Phys. 46 (2007) L648.
- (2007) Jpn. J. Appl. Phys , vol.46
- Yamamoto, H.¹ Kozawa, T.² Tagawa, S.³ Ohmori, K.⁴ Sato, M.⁵ Komano, H.⁶

21
- 33746476994
- H. Yamamoto, T. Kozawa, K. Okamoto, A. Saeki, S. Tagawa, T. Ando, M. Sato, and H. Komano: J. Vac. Sci. Technol. B 24 (2006) 1833.
- (2006) J. Vac. Sci. Technol. B , vol.24 , pp. 1833
- Yamamoto, H.¹ Kozawa, T.² Okamoto, K.³ Saeki, A.⁴ Tagawa, S.⁵ Ando, T.⁶ Sato, M.⁷ Komano, H.⁸

22
- 0001575941
- G. Pohlers, J. C. Scaiano, and R. Sinta: Chem. Mater. 9 (1997) 3222.
- (1997) Chem. Mater , vol.9 , pp. 3222
- Pohlers, G.¹ Scaiano, J.C.² Sinta, R.³

23
- 4444249958
- H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, Y. Yamamoto, T. Ando, M. Sato, H. Komano, and S. Tagawa: Jpn. J. Appl. Phys. 43 (2004) L848.
- (2004) Jpn. J. Appl. Phys , vol.43
- Yamamoto, H.¹ Kozawa, T.² Nakano, A.³ Okamoto, K.⁴ Yamamoto, Y.⁵ Ando, T.⁶ Sato, M.⁷ Komano, H.⁸ Tagawa, S.⁹

24
- 4444350372
- H. Yamamoto, A. Nakano, K. Okamoto, T. Kozawa, and S. Tagawa: Jpn. J. Appl. Phys. 43 (2004) 3971.
- (2004) Jpn. J. Appl. Phys , vol.43 , pp. 3971
- Yamamoto, H.¹ Nakano, A.² Okamoto, K.³ Kozawa, T.⁴ Tagawa, S.⁵

25
- 0033354643
- N. N. Matsuzawa, H. Oizumi, S. Mori, S. Irie, S. Shirayone, E. Yano, S. Okazaki, A. Ishitani, and D. A. Dixon: Jpn. J. Appl. Phys. 38 (1999) 7109.
- (1999) Jpn. J. Appl. Phys , vol.38 , pp. 7109
- Matsuzawa, N.N.¹ Oizumi, H.² Mori, S.³ Irie, S.⁴ Shirayone, S.⁵ Yano, E.⁶ Okazaki, S.⁷ Ishitani, A.⁸ Dixon, D.A.⁹

26
- 29044444718
- H. Yamamoto, T. Kozawa, A. Nakano, S. Tagawa, T. Ando, M. Sato, and H. Komano: Jpn. J. Appl. Phys. 44 (2005) L842.
- (2005) Jpn. J. Appl. Phys , vol.44
- Yamamoto, H.¹ Kozawa, T.² Nakano, A.³ Tagawa, S.⁴ Ando, T.⁵ Sato, M.⁶ Komano, H.⁷

27
- 29044442591
- H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, and H. Komano: J. Vac. Sci. Technol. B 23 (2005) 2728.
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 2728
- Yamamoto, H.¹ Kozawa, T.² Nakano, A.³ Okamoto, K.⁴ Tagawa, S.⁵ Ando, T.⁶ Sato, M.⁷ Komano, H.⁸

28
- 37149038003
- T. Kozawa, S. Tagawa, H. B. Cao, H. Deng, and M. J. Leeson: J. Vac. Sci. Technol. B 25 (2007) 2481.
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 2481
- Kozawa, T.¹ Tagawa, S.² Cao, H.B.³ Deng, H.⁴ Leeson, M.J.⁵

29
- 0033720560
- P. M. Dentinger, G. F. Cardinale, C. C. Henderson, A. Fisher, and A. K. Ray-Chaudhuri: Proc. SPIE 3997 (2000) 588.
- (2000) Proc. SPIE , vol.3997 , pp. 588
- Dentinger, P.M.¹ Cardinale, G.F.² Henderson, C.C.³ Fisher, A.⁴ Ray-Chaudhuri, A.K.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.