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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5754, Issue PART 1, 2005, Pages 38-52

Resist blur and line edge roughness

(1) Gallatin, Gregg M a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EDGE ROUGHNESS; POWER SPECTRUM; ROUGHNESS MAPS;

FREQUENCIES; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; SPECTRUM ANALYSIS; SURFACE ROUGHNESS;

EDGE DETECTION;

EID: 25144499519 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.607233 Document Type: Conference Paper

Times cited : (329)

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