Reaction mechanism of fluorinated chemically amplified resists

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 4, 2006, Pages 1833-1836

  Yamamoto, Hiroki ^a   Kozawa, Takahiro ^a   Okamoto, Kazumasa ^a   Saeki, Akinori ^a   Tagawa, Seiichi ^a   Ando, Tomoyuki ^b   Sato, Mitsuru ^b   Komano, Hiroji ^b  

^a OSAKA UNIVERSITY   (Japan)

^b TOKYO OHKA KOGYO CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDIZATION; ELECTRON BEAMS; HALOGENATION; LOW ENERGY ELECTRON DIFFRACTION; POLYMERS; POLYSTYRENES; REACTION KINETICS;

ACID GENERATION; FLUORINATION; PULSE RADIOLYSIS; X-RAY RESISTS;

ELECTRIC RESISTANCE;

EID: 33746476994     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2214711     Document Type: Article

References (36)

1. T. Kozawa, A. Saeki, and S. Tagawa, J. Vac. Sci. Technol. B 22, 3489 (2004).
2. T. Kozawa, H. Yamamoto, A. Saeki, and S. Tagawa, J. Vac. Sci. Technol. B 23, 2716 (2005).
3. G. N. Babu, A. Narula, S. L. Hsu, and J. C. W. Chien, Macromolecules 17, 2749 (1984).
4. S. Imamura, J. Electrochem. Soc. 126, 1628 (1979).
5. H. Shiraishi, Y. Taniguchi, S. Horigome, and S. Nonogaki, Polym. Eng. Sci. 20, 1054 (1980).
6. F. Schue, B. Holil, R. Sagnes, C. Montginoul, L. Giral, F. Buiguez, B. Serre, and C. Rosilio, Microelectron. Eng. 5, 315 (1986).
7. C. Pittman, M. Ueda, C. Chen, J. Kwiatkowski, C. Cook, and J. Helbert, J. Electrochem. Soc. 128, 1758 (1981).
8. G. N. Taylor, G. A. Coquin, and S. Smekh, Polym. Eng. Sci. 17, 420 (1977).
9. K. J. Przybilla, H. Roschert, and G. Pawlowski, Proc. SPIE 1672, 500 (1992).
10. J. R. Gandler and W. P. Jencks, J. Am. Chem. Soc. 104, 1937 (1982).
11. K. Patterson et al., Proc. SPIE 3999, 365 (2000).
12. D. S. Hall, B. Osborn, K. Patterson, S. D. Burns, and C. G. Willson, Proc. SPIE 4345, 1066 (2001).
13. H. Ito et al., J. Vac. Sci. Technol. B 19, 2678 (2001).
14. H. Ito, H. D. Truong, M. Okazaki, and R. A. DiPietro, J. Photopolym. Sci. Technol. 16, 523 (2003).
15. H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, and H. Komano, Jpn. J. Appl. Phys., Part 2 44, L842 (2005).
16. H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, and H. Komano, J. Vac. Sci. Technol. B 23, 2728 (2005).
17. T. Kozawa, Y. Yoshida, M. Uesaka, and S. Tagawa, Jpn. J. Appl. Phys., Part 1 31, 4301 (1992).
18. S. Tsuji, T. Kozawa, Y. Yamamoto, and S. Tagawa, J. Photopolym. Sci. Technol. 13, 733 (2000).
19. T. Kozawa, Y. Mizutani, M. Miyako, T. Yamamoto, S. Suemine, Y. Yoshida, and S. Tagawa, Nucl. Instrum. Methods Phys. Res. A 440, 251 (2000).
20. T. Kozawa, A. Saeki, Y. Yoshida, and S. Tagawa, Jpn. J. Appl. Phys., Part 1 41, 4208 (2002).
21. A. Saeki, T. Kozawa, S. Kashiwagi, K. Okamoto, G. Isoyama, Y. Yoshida, and S. Tagawa, Nucl. Instrum. Methods Phys. Res. A 546, 627 (2005).
22. V. A. Rassolov and A. Mozumder, J. Phys. Chem. B 105, 1430 (2001).
23. L. M. Dorfman, F. Y. Jou, and R. Wageman, Ber. Bunsenges. Phys. Chem. 75, 681 (1971).
24. H. Yamamoto, A. Nakano, K. Okamoto, T. Kozawa, and S. Tagawa, Jpn. J. Appl. Phys., Part 1 43, 3971 (2004).
25. C. Coenjarts et al., Proc. SPIE 3678, 1062 (1999).
26. G. Pohlers, J. C. Scaiano, and R. Sinta, Chem. Mater. 9, 3222 (1997).
27. H. Yamamoto et al., Jpn. J. Appl. Phys., Part 2 43, L848 (2004).
28. S. Tagawa, S. Nagahara, T. Iwamoto, M. Wakita, T. Kozawa, Y. Yamamoto, D. Werst, and A. D. Trifunac, Proc. SPIE 3999, 204 (2000).
29. J. L. Dektar and N. P. Hacker, J. Am. Chem. Soc. 112, 6004 (1990).
30. T. Kozawa, S. Nagahara, Y. Yoshida, S. Tagawa, T. Watanabe, and Y. Yamashita, J. Vac. Sci. Technol. B 15, 2582 (1997).
31. O. Brede, H. Orthner, V. Zubarev, and R. Hermann, J. Phys. Chem. 100, 7097 (1996).
32. R. Koester and K.-D. Asmus, J. Phys. Chem. 77, 749 (1973).
33. D. B. Naik and H. Mohan, Radiat. Phys. Chem. 73, 218 (2005).
34. S. Corrent, P. Hahn, G. Pohlers, T. J. Connoly, J. C. Scaiano, V. Fornes, and H. Garcia, J. Phys. Chem. B 102, 5852 (1998).
35. Y. Matsui, S. Umeda, S. Seki, S. Tagawa, S. Ishikawa, and T. Itani, Jpn. J. Appl. Phys., Part 1 42, 3894 (2003).
36. R. R. Kunz, Proc. SPIE 5376, 1 (2004).