Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Journal of Applied Physics

Volumn 103, Issue 8, 2008, Pages

  Singh, S V ^a,b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; HYSTERESIS; HYSTERESIS LOOPS; INDUCTIVELY COUPLED PLASMA;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); INDUCTIVE DISCHARGES; LANGMUIR PROBE MEASUREMENTS; MODE TRANSITION;

ARGON;

EID: 43049132897     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2905213     Document Type: Article

References (30)