Electrical characterization of radio frequency discharges

Plasma Sources Science and Technology

Volumn 14, Issue 2, 2005, Pages

  Mahony, C M O ^a   Maguire, P D ^a   Graham, W G ^b  

^a UNIVERSITY OF ULSTER   (United Kingdom)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC TRANSFORMERS; ELECTRONS; INDUCTANCE; MATHEMATICAL MODELS; NATURAL FREQUENCIES; PLASMA THEORY; PLASMAS; PROBABILITY; PROBES;

CIRCUIT MODELS; COIL LOSSES; ELECTRON ENERGY; LANGMUIR PROBES;

ELECTRIC DISCHARGES;

EID: 18744403723     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/14/2/S08     Document Type: Article

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