Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters

Volumn 89, Issue 16, 2006, Pages

  Singh, S V ^a   Kempkes, P ^b   Soltwisch, H ^b  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; ELECTRON TRANSITIONS; MAXWELL EQUATIONS; PHASE TRANSITIONS; PROBABILITY;

ELECTRON ENERGY DISTRIBUTION FUNCTION (EEDF); MAXWELLIAN SHAPE; POWER COUPLING;

ELECTRON ENERGY ANALYZERS;

EID: 33750198901     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2362599     Document Type: Article

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