Plasma boundary sheath in the afterglow of a pulsed inductively coupled RF plasma

Plasma Sources Science and Technology

Volumn 16, Issue 2, 2007, Pages 355-363

  Osiac, M ^a,e   Schwarz Selinger, T ^b   O'Connell, D ^a   Heil, B ^a   Petrovic, Z Lj ^c   Turner, M M ^d   Gans, T ^a,f   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^c UNIVERSITY OF BELGRADE   (Serbia)

^d DUBLIN CITY UNIVERSITY   (Ireland)

^e UNIVERSITY OF CRAIOVA   (Romania)

^f QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON TEMPERATURE; OPTICAL EMISSION SPECTROSCOPY; PLASMA HEATING; POSITIVE IONS;

ELECTRON HEATING; HYDROGEN PLASMA; ION ENERGY ANALYSER; PLASMA BOUNDARY SHEATH; POSITIVE ION FLUX;

GLOW DISCHARGES;

EID: 34247499141     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/2/019     Document Type: Article

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