Theoretical and experimental investigations of the electromagnetic field within a planar coil, inductively coupled RF plasma source

Plasma Sources Science and Technology

Volumn 7, Issue 2, 1998, Pages 162-178

  El Fayoumi, I M ^a   Jones, I R ^a  

^a FLINDERS UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC COILS; ELECTROMAGNETIC FIELD THEORY; MATHEMATICAL MODELS; TEMPERATURE;

PLANAR COIL; RADIO FREQUENCY PLASMA SOURCES;

PLASMA SOURCES;

EID: 0032072784     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/2/011     Document Type: Article

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