On the E-H mode transition in RF inductive discharges

Journal of Physics D: Applied Physics

Volumn 29, Issue 5, 1996, Pages 1224-1236

  Kortshagen, U ^a   Gibson, N D ^a   Lawler, J E ^a  

^a Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC COILS; ELECTRIC CURRENTS; ELECTRON TRANSITIONS; HYSTERESIS; LIGHT EMISSION; MATHEMATICAL MODELS; PLASMAS; SKIN EFFECT;

CAPACITIVE COUPLING; INDUCTIVE COUPLING; MODE TRANSITION;

GLOW DISCHARGES;

EID: 0030141638     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/29/5/017     Document Type: Article

References (37)

1. Hittorf W 1884 Ann. Phys., Lpz. 21 90
2. Thomson J J 1927 Phil. Mag. 4 1128
3. Townsend J S and Donaldson R H 1928 Phil. Mag. 5 178
4. Eckert H U 1974 High Temp. Sci. 6 99
5. Keller J H, Forster J C and Barnes M S 1993 J. Vac. Sci. Technol. A 11 2487
6. Hopwood J 1992 Plasma Sources Sci. Technol. 1 109
7. Carter J B, Holland J P, Peltzer E, Richardson B, Nguyen H T, Melaku Y, Gates D and Ben-Dor M 1993 J. Vac. Sci. Technol. A 11 1301
8. Patrick R, Schoenborn P, Toda H and Bose F 1993 J. Vac. Sci. Technol. A 11 1296
9. Gabriel C T and Melaku Y 1994 J. Vac. Sci. Technol. B 12 454
10. Wharmby D O 1993 IEE Proc. A 140 465
11. MacKinnon K A 1929 Phil. Mag. 8 605
12. Chandrakar K 1978 J. Phys. D: Appl. Phys. 11 1809
13. Amorim J, Maciel H S and Sudano J P 1991 J. Vac. Sci. Technol. B 9 362
14. Margrave J L 1967 Characterization of High Temperature Vapours (New York: Wiley)
15. Wamsley R C, Lawler J E, Ingold J H, Bigio L and Roberts V D 1990 Appl. Phys. Lett. 57 2416
16. Menningen K L, Childs M A, Toyoda H, Ueda Y, Anderson L W and Lawler J E 1995 Contrib. Plasma Phys. 35 359
17. Piejak R B, Godyak V A and Alexandrovich B M 1992 Plasma Sources Sci. Technol. 1 179
18. Lieberman M A and Lichtenberg A J 1994 Principles of Plasma Discharges and Materials Processing (New York: Wiley)
19. Godyak V A, Piejak R B and Alexandrovich B M 1994 Plasma Sources Sci. Technol. 3 169
20. Jackson J D 1975 Classical Electrodynamics (New York: Wiley)
21. Hackbusch W 1985 Multi-Grid Methods and Applications (Berlin: Springer)
22. Kortshagen U, Pukropski I and Tsendin L D 1995 Phys. Rev. E 51 6063
23. Ferreira C M and Moisan M 1988 Phys. Scr. 38 382
24. Sá P A, Loureiro J and Ferreira C M 1992 J. Phys. D: Appl. Phys. 25 960
25. Berndt J, Kortshagen U and Schlüter H 1994 J. Phys. D: Appl. Phys. 27 1470
26. Aliev Y M, Maximov A V, Kortshagen U, Schlüter H and Shivarova A 1995 Phys. Rev. E 51 6091
27. Boulos I B, Fauchais P and Pfender E 1994 Thermal Plasmas: Fundamentals and Applications vol 1 (New York: Plenum)
28. Godyak V A and Shinomiya M 1994 47th Gaseous Electronics Conf. (Gaithersburg, MD), 1995 Private communication
29. Thorne A P 1988 Spectrophysics (London: Chapman and Hall)
30. Böhle A and Kortshagen U 1994 Plasma Sources Sci. Technol. 3 80
31. Kortshagen U, Shivarova A, Tatarova E and Zamfirov D 1994 J. Phys. D: Appl. Phys. 27 301
32. Tsendin L D 1995 Plasma Sources Sci. Technol. 4 200
33. Kolobov V I, Beale D F, Mahoney L J and Wendt A E 1994 Appl. Phys. Lett. 65 537
34. Kortshagen U, Pukropski I and Zethoff M 1994 J. Appl. Phys. 76 2048
35. Ferreira C M and Loureiro J 1983 J. Phys. D: Appl. Phys. 16 2471
36. Abramovitz M and Stegun I A 1970 Handbook of Mathematical Functions (New York: Dover)
37. Winkler R, Deutsch H, Wilhelm J and Wilke C 1984 Beitr. Plasmaphys. 24 285