Heating-mode transition in the capacitive mode of inductively coupled plasmas

Applied Physics Letters

Volumn 80, Issue 10, 2002, Pages 1725-1727

  Chung, Chinwook ^a   Chang, Hong Young ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE COUPLED PLASMAS; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON HEATING; ELECTRON-ELECTRON COLLISIONS; HIGH PRESSURE; HIGH-DENSITY; LOW PRESSURES; PRESSURE INCREASE;

DISTRIBUTION FUNCTIONS; ELECTRON ENERGY ANALYZERS; ELECTRONS;

INDUCTIVELY COUPLED PLASMA;

EID: 79956033873     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1456263     Document Type: Article

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