Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

Journal of Physics D: Applied Physics

Volumn 41, Issue 18, 2008, Pages

  Corr, C S ^a   Despiau Pujo, E ^b   Chabert, P ^b   Graham, W G ^c   Marro, F G ^c   Graves, D B ^d  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b ECOLE POLYTECHNIQUE   (France)

^c QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^d University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749083435     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/18/185202     Document Type: Article

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