Structure observed in measured electron energy distribution functions in capacitively coupled radio frequency hydrogen plasmas

Applied Physics Letters

Volumn 75, Issue 3, 1999, Pages 331-333

  Mahony, C M O ^a   McFarland, J ^a   Steen, P G ^a   Graham, W G ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001616830     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124366     Document Type: Article

References (19)

1. P. J. Hargis, Jr., K. E. Greenberg, P. A. Miller, J. B. Gerardo, J. R. Torczymski, M. E. Riley, G. A. Hebner, J. R. Roberts, J. K. Olthoff, J. R. Whetstone, R. J. Van Brunt, M. M. Sobolewski, H. M. Anderson, M. P. Splichal, J. L. Mock, P. Bletzinger, A. Garscadden, R. A. Gottscho, G. Selwyn, M. Dalvie, J. E. Heidenreich, J. W. Butterbaugh, M. L. Brake, M. L. Passov, J. Pender, A. Lujan, M. E. Elta, D. B. Graves, H. H. Sawin, M. J. Kushner, J. T. Verdeyen, R. Horwath, and T. R. Turner, Rev. Sci. Instrum. 65, 140 (1994).
2. R. R. J. Gagne and A. Cantin, J. Appl. Phys. 43, 2639 (1972).
3. V. A. Godyak, in Plasma-Surface Interactions and Processing of Materials, NATO ASI, edited by O. Auciello, A. Grasmarti, J. A. Vallesabarca, and D. L. Flamm (Kluwer, Dordrecht, 1990), Vol. 176, p. 95.
4. V. A. Godyak, R. B. Piejak, and B. M. Alexandrovich, Plasma Sources Sci. Technol. 1, 36 (1992).
5. C. M. O. Mahony, R. Al-Wazzan, and W. G. Graham, Appl. Phys. Lett. 71, 608 (1997).
6. M. B. Hopkins and W. G. Graham, Rev. Sci. Instrum. 57, 2210 (1986).
7. M. J. Druyvesteyn, Z. Phys. 64, 781 (1930).
8. V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990).
9. N. St. J. Braithwaite and A. Goodyear (private communication).
10. M. B. Hopkins, C. A. Anderson, and W. G. Graham, Europhys. Lett. 8, 141 (1989).
11. M. M. Turner and M. B. Hopkins, Phys. Rev. Lett. 69, 3511 (1992).
12. A. V. Phelps JILA ftp site, ftp://jila.colorado.edu/collision_data/
13. H. Amemiya, J. Phys. D 23, 999 (1990).
14. M. Bacal, G. W. Hamilton, A. M. Brunetaeu, H. J. Dnucet, and J. Taillet, Rev. Sci. Instrum. 50, 719 (1979).
15. O. Leroy, P. Stratil, J. Perrin, J. Jolly, and P. Belenguer, J. Phys. D 28, 500 (1995).
16. F. Tochikubo, T. Makabe, S. Kakuta, and A. Suzuki, J. Appl. Phys. 71, 2143 (1992).
17. W. G. Graham and C. M. O. Mahony in Electron Kinetics and Applications of Glow Discharges, NATO ASI edited by U. Kortshagen and L. D. Tsendin (Plenum, New York, 1998), Vol. 367, p. 503.
18. M. M. Turner (private communication).
19. D. Vender and R. W. Boswell, J. Vac. Sci. Technol. A 4, 1331 (1992).