Relaxation oscillations of low-frequency Ar/SF6 inductive plasma discharges

Plasma Sources Science and Technology

Volumn 12, Issue 3, 2003, Pages 396-402

  Tuszewski, M ^a   White, R R ^a   Wurden, G A ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC COILS; ELECTRONIC DENSITY OF STATES; FIBER OPTICS; INTERFEROMETERS; PHOTOMULTIPLIERS; PLASMA DIAGNOSTICS; PLASMA FLOW; PLASMA OSCILLATIONS; PLASMA STABILITY; RELAXATION PROCESSES;

INDUCTIVE PLASMA DISCHARGE; LANGMUIR PROBE ARRAY; QUASI-SPHERICAL DOWNSTREAM LAYER; RELAXATION OSCILLATION; VIDEO IMAGING;

INDUCTIVELY COUPLED PLASMA;

EID: 0042322577     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/12/3/313     Document Type: Article

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