Instabilities of Ar/SF6 inductive plasma discharges

Journal of Applied Physics

Volumn 94, Issue 5, 2003, Pages 2858-2863

  Tuszewski, M ^a   White, R R ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; IONIZATION; OSCILLATIONS;

PLASMA DISCHARGES;

INDUCTIVELY COUPLED PLASMA;

EID: 0141746006     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1600830     Document Type: Article

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