Temporal phenomena in inductively coupled chlorine and argon-chlorine discharges

Applied Physics Letters

Volumn 86, Issue 14, 2005, Pages 1-3

  Corr, C S ^a,b   Steen, P G ^a,c   Graham, W G ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

^b ECOLE POLYTECHNIQUE   (France)

^c OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CHLORINE; CONCENTRATION (PROCESS); DEPOSITION; ETCHING; GAS DISCHARGE TUBES; MIXTURES; PHOTODIODES; PLATINUM; PRESSURE EFFECTS;

ARGON-CHLORINE DISCHARGES; ARGON-CHLORINE MIXTURES; GAS PRESSURE; INDUCTIVELY COUPLED CHLORINE;

INDUCTIVELY COUPLED PLASMA;

EID: 17444375267     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1897060     Document Type: Article

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