Stacked two dimensional micro-lens scanner for micro confocal imaging array

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 483-486

  Kwon, Sunghoon ^a   Lee, Luke P ^a  

^a University of California at Berkeley   (United States)

Author keywords

Confocal microscope; Lab on a chip; MEMS; Microlens; Resonator; Scanning

Indexed keywords

IMAGE ANALYSIS; MICROLENSES; MICROSCOPIC EXAMINATION; RESONATORS; SCANNING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; SURFACE TENSION;

LAB ON A CHIP; MICRO CONFOCAL IMAGING ARRAY; MICROLENS SCANNER;

MICROELECTROMECHANICAL DEVICES;

EID: 0036120450     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)