A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process

Journal of Lightwave Technology

Volumn 21, Issue 7, 2003, Pages 1700-1708

  Toshiyoshi, Hiroshi ^a   Su, Guo Dung John ^b   LaCosse, Jason ^b   Wu, Ming C ^b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Microactuator; Microlens; Optical scanner; Photoresist reflow technique; XY stage

Indexed keywords

MATHEMATICAL MODELS; MICROLENSES; OPTICAL FIBERS; OPTICAL SWITCHES; PHOTORESISTS; THICKNESS MEASUREMENT; WAVELENGTH DIVISION MULTIPLEXING;

OPTICAL SCANNING ANGLE; PHOTORESIST LENSES; THERMAL REFLOW PROCESS;

OPTICAL DEVICES;

EID: 0042888683     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.814399     Document Type: Article

References (16)

1. L. Y. Lin, E. L. Goldstein, and R. W. Tkach, "Free-space micromachine optical switches for optical networking," IEEE J. Select. Topics Quantum Electron., vol. 5, no. 1, pp. 4-9, 1999.
2. M. C. Wu, L. Fan, and G.-D. Su, "Micromechanical photonic integrated circuits," Trans. IEICE, vol. E83-C, no. 6, p. 903, 2000.
3. F. Fujita and H. Toshiyoshi, "Micro-optical devices," in A Chapter Contributed to P. Rai-Choudhury: Handbook of Microlithography, Micromachining. Bellingham, WA: SPIE Optical Engineering Press, 1997.
4. J. A. Walker, "The future of MEMS in telecommunications networks," J. Micromech. Microeng., vol. 10, no. 3, pp. R1-R7, Sept. 2000.
5. D. T. Neilson, V. A. Aksyuk, S. Arney, N. R. Basavanhally, K. S. Bhalla, D. J. Bishop, B. A. Boie, C. A. Bolle, J. V. Gates, A. M. Gottlieb, J. P. Hickey, N. A. Jackman, P. R. Kolodner, S. K. Korotky, B. Mickkelsen, F. Pardo, G. Raybon, R. Ruel, R. E. Scotti, T. W. Van Blarcum, L. Zhang, and C. R. Giles, "Fully provisioned 112 × 112 micro-mechanical optical crossconnect with 35.8 Tb/s demonstrated capacity," in Proc. 25th Optical Fiber Commun. Conf. (OFC'2000), Baltimore, MD, Mar. 7-10, 2000, PD12-1.
6. V. A. Aksyuk, "Beam steering micromirrors for optical telecommunication," in Proc. IEEE/LEOS Int. Conf. Optical MEMS 2001, vol. IT-7, Sept. 2001.
7. R. Sawada, E. Higurashi, and A. Shimizu, "Single crystalline mirror actuated electrostatically by terrated electrodes with high aspect ratio torsion spring," in Proc. IEEE/LEOS Int. Conf. Optical MEMS 2001, Sept. 2001, pp. 23-24.
8. H. Toshiyoshi, G.-D. J. Su, J. LaCosse, and M. C. Wu, "Micromechanical lens scanners for fiber optic switches," in Proc. 3rd Int. Conf. Micro Opto Electro Mechanical Systems (MOEMS'99), Mainz, Germany, Aug. 30-Sept. 1, 1999, pp. 165-170.
9. S. Glockner, R. Goring, B. Gotz, and A. Rose, "Piezoelectrically driven micro-optic fiber switches," Opt. Eng., vol. 37, no. 4, pp. 1229-1234, Apr. 1998.
10. H. Sankur, R. Hall, E. Motamedi, W. Gunning, and W. Tennant, "Fabrication of microlens arrays by reactive ion milling," in Proc. SPIE, vol. 2687, pp. 150-5.
11. C. R. King, L. Y. Lin, and M. C. Wu, "Out-of-plane refractive microlens fabricated by surface micromachining," IEEE Photon. Technol. Lett., vol. 8, no. 10, pp. 1349-1351, 1996.
12. H. P. Herzig, Micro-Optics: Element, System, and Applications, London, U.K.: Taylor Francis, 1997.
13. T. Akiyama, D. Collard, and H. Fujita, "Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS," IEEE J. Microelectromech. Syst., vol. 6, pp. 10-17, Mar. 1997.
14. F. Fan and M. C. Wu, "Self-assembled micro-XYZ stages for moving micro-ball lenses," in Int. Conf. Optical MEMS and Their Applications (MOEMS 97), Nara, Japan, Nov. 18-21, 1997, pp. 45-46.
15. R. T. Chen, H. Nguyen, and M. C. Wu, "A low voltage micromachined optical switch by stress-induced bending," in Proc. 12th Int. Workshop Micro Electro Mechanical Systems (MEMS 99), Orlando, FL, Jan. 17-21, 1999, pp. 424-428.
16. A. Tuantranont, V. M. Bright, J. Zhang, W. Zhang, J. Ness, and Y. C. Lee, "MEMS-controllable microlens array for beam steering and precision alignment in optical interconnect system," in Proc. 2000 Solid-State Sensor and Actuator Workshop (Hilton Head 2000), Hilton Head Island, SC, June 4-8, 2000, pp. 101-104.