Design, modeling, fabrication and testing of a high aspect ratio electrostatic torsional MEMS micromirror

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 2147-2156

  Joudrey, Kurt ^a   Adams, George G ^a   McGruer, Nicol E ^a  

^a Northeastern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; FINITE ELEMENT METHOD; MICROMACHINING; NICKEL; SCANNING; SILICON WAFERS;

DYNAMIC BEHAVIOR; ELECTROSTATIC TORSIONAL; MEMS MICROMIRRORS; RESIDUAL STRAINS;

MIRRORS;

EID: 33748764700     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/031     Document Type: Article

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