Scanning micromirrors fabricated by an SOI/SOI wafer-bonding process

Journal of Microelectromechanical Systems

Volumn 15, Issue 1, 2006, Pages 24-32

  Zhou, Lixia ^a   Kahn, Joseph M ^c   Pister, Kristofer S J ^b  

^a QUALCOMM INC   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Stanford University   (United States)

Author keywords

Electrostatic actuation; MEMS; Micromirror; Silicon or insulator technology; Wafer bonding

Indexed keywords

ASPECT RATIO; ELECTROSTATIC ACTUATORS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL LINKS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

LATERAL ACTUATION; SCANNING MICROMIRRORS; TORSIONAL BEAMS; WAFER BONDING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 32244440288     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2005.863736     Document Type: Article

References (28)

1. O. Solgaard, D. Lee, Y. Kyoungsik, U. Krishnamoorthy, K. Li, and J. P. Heritage, "Microoptical phased arrays for spatial and spectral switching," IEEE Commun. Mag., vol. 41, no. 3, pp. 96-102, 2003.
2. P. B. Ruffin, "Optical MEMS-based arrays," Proc.SPIE - The International Society for Optical Engineering, vol. 5055, pp. 230-41, 2003.
3. J. M. Kahn, "Secure free-space optical communication between moving platforms," in Proc. 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society, vol. 2, 2002, pp. 455-6.
4. M. Last, B. S. Leibowitz, B. Cagdaser, A. Jog, L. Zhou, B. Boser, and K. S. J. Pister, "Toward a wireless optical communication link between two small unmanned aerial vehicles," in Proc. IEEE International Symposium on Circuits and Systems, Bangkok, Thailand, 2003.
5. D. J. Bishop, C. R. Giles, and S. R. Das, "The rise of optical switching," Sci. Amer., pp. 74-9, Jan. 2001.
6. G. A. Feather and D. W. Monk, "Digital micromirror device for projection display," Proc. SPIE - The International Society for Optical Engineering, vol. 2407, pp. 90-5, 1995.
7. M. H. Kiang, O. Solgaard, R. S. Muller, and K. Y. Lau, "Micromachined polysilicon microscanners for barcode readers," IEEE Photon. Technol. Lett., vol. 8, pp. 1707-9, 1996.
8. M. A. Helmbrecht, U. Srinivasan, C. Rembe, R. T. Howe, and R. S. Muller, "Micromirrors for adaptive-optics arrays," in Proc. 11th International Conference on Solid-State Sensors and Actuators, vol. 2, 2001, pp. 1290-3.
9. J. D. Berger, D. Anthon, and H. Jerman, "External cavity diode lasers tuned with silicon MEMS," Semicond. Int., vol. 25, no. 2, pp. Sup18-14, 2002.
10. R. Conant, J. Nee, K. Lau, and R. Muller, "A fast flat scanning micromirror," in Proc. 2000 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 2000, pp. 6-9.
11. U. Krishnamoorthy, D. Lee, and O. Solgaard, "Self-aligned vertical electrostatic combdrives for micromirror actuation," J. Microelectromech. Syst., vol. 12, pp. 458-64, 2003.
12. V. Milanovic, S. Kwon, and L. P. Lee, "Monolithic vertical combdrive actuators for adaptive optics," in Proc. 2002 IEEE/LEOS International Conference on Optical MEMS, 2002, pp. 57-8.
13. P. R. Patterson, D. Hah, H. Nguyen, H. Toshiyoshi, R. Chao, and M. C. Wu, "A scanning micromirror with angular comb drive actuation," in Proc. 15th IEEE International Conference on Micro Electro Mechanical Systems, 2002, pp. 544-7.
14. J. Kim, H. Choo, L. Lin, and R. S. Muller, "Microfabricated torsional actuator using self-aligned plastic deformation," in Proc. 12th International Conference on Solid-State Sensors and Actuators, Transducers 2003, vol. 2, 2003, pp. 1015-8.
15. S. Kwon, V. Milanovic, and L. P. Lee, "A high aspect ratio 2D gimbaled microscanner with large static rotation," in Proc. 2002 IEEE/LEOS International Conference on Optical MEMS, 2002, pp. 149-50.
16. V. Milanovic, G. Matus, T. Cheng, and B. Cagdaser, "Monolithic high aspect ratio two-axis optical scanners in SOI," in Proc. 2003 IEEE MEMS Conference, 2003, pp. 255-8.
17. V. Milanovic, M. Last, and K. S. J. Pister, "Torsional micromirrors with lateral actuators," in Proc. 11th International Conference on Solid-State Sensors and Actuators, Transducers 2001, Munich, Germany, 2001.
18. B. Cagdaser, A. Jog, M. Last, B. S. Leibowitz, L. Zhou, E. Shelton, K. S. J. Pister, and B. E. Boser, "Capacitive sense feedback control for MEMS beam steering mirrors," in Proc. 2004 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 2004, pp. 348-51.
19. K. Somasundram, D. Cole, C. McNamara, A. Boyle, P. McCann, C. Devine, and A. Nevin, "Fusion-bonded multilayer SOI for MEMS applications," Proc. SPIE - The International Society for Optical Engineering, vol. 5116, pp. 12-9, 2003.
20. F. S. D'aragno, T. Iwamoto, H. D. Chiou, and A. Mirza, "A study of silicon direct wafer bonding for MEMS application," in Proc. 4th International Symposium on Semiconductor Wafer Bonding: Science, Technology, and Applications, vol. 97-36, 1998, pp. 127-37.
21. A. Brown, G. O'Neill, and S. Blackstone, "Single-crystal micromachining using multiple fusion-bonded layers," in Proc. SPIE - The International Society for Optical Engineering, vol. 4174, 2000, pp. 406-15.
22. M. Schmidt, "Wafer-to-wafer bonding for microstructure formation," Proc. IEEE, vol. 86, pp. 1575-85, 1998.
23. H. C. Liu and S. P. Murarka, "Elastic and viscoelastic analysis of stress in thin films," J. Appl. Phys., vol. 72, no. 8, pp. 3458-63, 1992.
24. K. S. Chen, A. A.Ayon, X. Zhang, and S. M. Spearing, "Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)," J. Microelectromech. Syst., vol. 11, pp. 264-75, 2002.
25. L. Zhou, M. Last, V. Milanovic, J. M. Kahn, and K. S. J. Pister, "Two-Axis scanning mirror for free-space optical communication between UAVs," in Proc. IEEE/LEOS Optical MEMS, HI, USA, Aug. 2003.
26. L. Muller, A. P. Pisano, and R. T. Howe, "Microgimbal torsion beam design using open, thin-walled cross sections," J. Microelectromech. Syst., vol. 10, pp. 550-60, 2001.
27. R. Legtenberg, A. W. Groeneveld, and M. Elwenspoek, "Comb-Drive actuators for large displacements," J. Micromech. Microeng., vol. 6, no. 3, pp. 320-9, 1996.
28. J. D. Grade, H. Jerman, and T. W. Kenny, "Design of large deflection electrostatic actuators," J. Microelectromech. Syst., vol. 12, pp. 335-43, 2003.