Topological layer switch technique for monolithically integrated electrostatic XYZ-stage

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 651-654

  Takahashi, Kazuhiro ^a,b   Mita, Makoto ^c   Fujita, Hiroyuki ^a   Toshiyoshi, Hiroshi ^a,b  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY   (Japan)

^c JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROSTATICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; NONMETALS; REACTIVE ION ETCHING; SILICON; SWITCHES; TOPOLOGY;

APPLIED VOLTAGES; ELASTIC COMPONENTS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; MONOLITHICALLY INTEGRATED; SILICON LAYERS; SWITCH TECHNIQUE; Z DIRECTIONS;

STAGES;

EID: 52149118012     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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2. C. H. Kim, H. M. Jeong, J. U. Jeon, and Y. K. Kim, "Silicon Micro XY-Stage With a Large Area Shuttle and No-Etching Holes for SPM-Based Data Storage," IEEE/ASME J. Microelectromech. Syst., vol. 12, no. 4, pp. 470-478, 2003.
3. K. Takahashi, H. N. Kwon, K. Saruta, M. Mita, H. Fujita, and H. Toshiyoshi, "A Two-dimensional f-θ Micro Optical Lens Scanner with Electrostatic Comb-drive XY-stage," IEICE Electronics Express, vol. 2, no. 21, pp. 542-547, 2005
4. K. Takahashi, M. Mita, H. Fujita, and H. Toshiyoshi, "A high fill-factor comb-driven XY-stage with topological layer switch architecture," IEICE Electronics Express, vol.3, no.9, pp. 197-202, 2006.
5. Y. Mita, M. Mita, A. Tixier, J. P. Gouy, and H. Fujita, "Embedded-Mask-Methods for mm-scale multi-layer vertical/slanted Si structures," in Proc. The 13th IEEE Int. Conf. on Micro Electro Mech. Syst. (MEMS 2000), Miyazaki, Japan, Jan. 26-29, 2000, pp. 300-305.
6. Y. Fukuta, H. Fujita, and H. Toshiyoshi, "Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems," J. J. Appl. Phys., vol.42, pp.3690-3694, 2003.