MicroXY stages with spider-leg actuators for two-dimensional optical scanning

Sensors and Actuators, A: Physical

Volumn 130-131, Issue SPEC. ISS., 2006, Pages 468-477

  Kwon, Ho Nam ^a,b   Lee, Jong Hyun ^a   Takahashi, Kazuhiro ^b   Toshiyoshi, Hiroshi ^b  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Actuator; Lens scanner; Micromachined; Optical cross connect (OXC); Spider leg; XY stage

Indexed keywords

INFRARED LAMPS; MICROLENSES; MICROMACHINING; OPTICAL PROPERTIES; REACTIVE ION ETCHING; SCANNING; SILICON ON INSULATOR TECHNOLOGY;

LENS SCANNERS; MICROMACHINED; OPTICAL CROSS CONNECT (OXC); SPIDER-LEG; STAGE-SUSPENSION SPRINGS; XY STAGES;

ACTUATORS;

EID: 33745852195     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.10.037     Document Type: Article

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