Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

Journal of Microelectromechanical Systems

Volumn 13, Issue 3, 2004, Pages 526-535

  Bernstein, Jonathan J ^a   Taylor, William P ^b   Brazzle, John D ^c   Corcoran, Christopher J ^d   Kirkos, Gregory ^a   Odhner, Jefferson E ^e   Pareek, Ajay ^f   Waelti, Marc ^g   Zai, Marvin ^f  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b Allegro Microsystems   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d Corcoran Engineering ^*  (United States)

^e BAE SYSTEMS   (United States)

^f Science and Technology Division   (United States)

^g Phonak AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; MAGNETIC FIELD EFFECTS; MAGNETIC HYSTERESIS; MATHEMATICAL MODELS; MICROMACHINING; MIRRORS; OPTICAL SWITCHES; PERMANENT MAGNETS; SILICON ON INSULATOR TECHNOLOGY; TRANSDUCERS; VIBRATIONS (MECHANICAL);

ELECTROMAGNETIC ACTUATION; MAGNETIC TRANSDUCERS; MICROELECTROMECHANICAL SYSTEMS; MIRROR ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 3142735762     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.828705     Document Type: Article

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