Electromagnetically actuated mirror arrays for use in 3-D optical switching applications

Journal of Microelectromechanical Systems

Volumn 13, Issue 3, 2004, Pages 526-535

  Bernstein, Jonathan J ^a   Taylor, William P ^b   Brazzle, John D ^c   Corcoran, Christopher J ^d   Kirkos, Gregory ^a   Odhner, Jefferson E ^e   Pareek, Ajay ^f   Waelti, Marc ^g   Zai, Marvin ^f  

^a CHARLES STARK DRAPER LABORATORY   (United States)

^b Allegro Microsystems   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

^d Corcoran Engineering ^*  (United States)

^e BAE SYSTEMS   (United States)

^f Corning IntelliSense ^*  (United States)

^g Phonak AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; MAGNETIC FIELD EFFECTS; MAGNETIC HYSTERESIS; MATHEMATICAL MODELS; MICROMACHINING; MIRRORS; OPTICAL SWITCHES; PERMANENT MAGNETS; SILICON ON INSULATOR TECHNOLOGY; TRANSDUCERS; VIBRATIONS (MECHANICAL);

ELECTROMAGNETIC ACTUATION; MAGNETIC TRANSDUCERS; MICROELECTROMECHANICAL SYSTEMS; MIRROR ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 3142735762     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.828705     Document Type: Article

References (22)

1. R. E. Wagner et al., "Optical network architectures," in Long-Haul and Access Networks, Optical Metro and WDM, A. Lord et al., Eds. New York: IOS Press, 2001.
2. L. Nederlof, J. R. Jacobs, B. R. Hemenway, M. J. Soulliere, M. D. Vaughn, E. L. Buckland, R. E. Wagner, and D. Charlton, "Value proposition for configurable optical networks," in Proc. OFC 2001, vol. 1, Anaheim, CA, Mar. 2001, pp. ML4/1-ML4/3.
3. M. Wu, "Micromachining for optical and optoelectronic systems," Proc. IEEE, vol. 85, no. 11, pp. 1833-1856, Nov. 1997.
4. R. R. A. Syms, "Scaling laws for MEMS mirror-rotation optical cross connect switches," J. Lightwave Technol., vol. 20, pp. 1084-1094, July 2002.
5. L. J. Hornbeck, "Current status of the digital micromirror device (DMD) for projection television applications," in Proc. 1993 Int. Electron Devices Mtg., pp. 381-384.
6. V. Milanovic, M. Last, and K. J. Pister, "Laterally actuated torsional micromirrors for large static deflection," IEEE Photon. Technol. Lett., vol. 15, pp. 245-247, Feb. 2003.
7. M. R. Dokmeci, S. Bakshi, M. Waelti, A. Pareek, C. Fung, and C. H. Mastrangelo, "Bulk micromachined electrostatic beam steering micromirror array," in Proc. IEEE/LEOS International Conference on Optical MEMS, 2002, pp. 15-16.
8. Y. Mizuno, O. Tsuboi, N. Kouma, H. Soneda, H. Okuda, Y. Nakamura, S. Ueda, I. Sawaki, and F. Yamagishi, "A 2-axis comb-driven micromirror array for 3D MEMS switches," in Proc. IEEE/LEOS International Conference on Optical MEMS, 2002, pp. 17-18.
9. J. W. Judy and R. S. Muller, "Magnetically actuated, addressable microstructures," J. Microelectromech. Syst., vol. 6, pp. 249-256, Sept. 1997.
10. H. Toshiyoshi, D. Miyauchi, and H. Fujita, "Electromagnetic torsion mirrors for self-aligned fiber optic crossconnectors by silicon micromachining," IEEE J. Select. Topics Quantum Electron., vol. 5, pp. 10-17, Jan./Feb. 1999.
11. C. H. Ji, Y. K. Kim, and B. K. Choi, "Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring," in Proc. 2000 IEEE/LEOS Int. Conf. on Optical MEMS, 2000, pp. 97-98.
12. R. A. Miller, Y. C. Tai, G. Xu, J. Bartha, and F. Lin, "An electromagnetic MEMS 2 × 2 fiber optic bypass switch," in Proc. 1997 Int. Conf. on Solid State Sensors and Actuators, vol. 1, 1997, pp. 89-92.
13. N. Asada, H. Matsuki, K. Minami, and M. Esashi, IEEE Trans. Magn., vol. 30, no. 6, pp. 4647-4649, Nov. 1994.
14. N. Asada, M. Takeuchi, V. Vaganov, N. Belov, S. Hout, and I. Sluchak, Sens. Actuators, vol. 83, pp. 284-290, 2000.
15. H. Miyajima, N. Asaoka, M. Arima, Y. Minamoto, K. Murakami, K. Tokuda, and K. Matsumoto, "A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges," J. Microelectromech. Syst., vol. 10, pp.. 418-424, Sept. 2001.
16. The Nippon Signal Company, LTD, "Planar Type Electromagnetic Actuator, Asada," U.S. Patent 5 912 608.
17. I. J. Cho, K. S. Yun, H. K. Lee, J. B. Yoon, and E. Yoon, "A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars," in Proc. Micro Electro Mechanical Systems (MEMS 2002), 2002, pp. 540-543.
18. Y. Okano and Y. Hirabayashi, "Magnetically actuated micromirror and measurement system for motion characteristics using specular reflection," IEEE J. Select. Topics Quantum Electron., vol. 8, pp. 19-25, Feb. 2002.
19. A. S. Dewa, J. W. Orcutt, M. Hudson, D. Krozier, A. Richards, and H. Laor, "Development of a silicon two-axis micromirror for an optical cross-connect," in Proc. 2000 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 4-8, 2000, pp. 93-96.
20. L. Houlet, P. Helin, T. Bourouina, G. Reyne, E. Dufour-Gergam, and H. Fujita, IEEE J. Select. Topics Quantum Electron., vol. 8, pp. 58-63, February 2002.
21. W. P. Taylor, J. J. Bernstein, J. D. Brazzle, and C. J. Corcoran, "Magnet arrays for use in a 3-D MEMS mirror array for optical switching," IEEE Trans. Magn., vol. 39, pp. 3286-3288, Sept. 2003, to be published.
22. J. D. Brazzle, W. P. Taylor, J. J. Price, and J. J. Bernstein, "A hysteresis-free platinum alloy flexure material for improved performance and reliability of MEMS devices," in Proc. Transducers 2003, Boston, MA, 2003, pp. 1152-1155.