Characterization of extreme ultraviolet emission using the fourth harmonic of a Nd:YAG laser

Applied Physics Letters

Volumn 86, Issue 18, 2005, Pages 1-3

  Yamaura, Michiteru ^a   Uchida, Shigeaki ^a   Sunahara, Atsushi ^a   Shimada, Yoshinori ^a   Nishimura, Hiroaki ^b   Fujioka, Shinsuke ^b   Okuno, Tomoharu ^b   Hashimoto, Kazuhisa ^a   Nagai, Keiji ^b   Norimatsu, Takayoshi ^b   Nishihara, Katsunobu ^b   Miyanga, Noriaki ^b   Izawa, Yasukazu ^b   Yamanaka, Chiyoe ^a  

^a INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; HARMONIC ANALYSIS; IRRADIATION; LASER PRODUCED PLASMAS; NEODYMIUM LASERS; SPECTRUM ANALYSIS; TIN; YTTRIUM COMPOUNDS;

ANGULAR DISTRIBUTION; EMISSION SPECTRA; LASER-PRODUCED TIN PLASMAS; ULTRAVIOLET EMISSION;

ULTRAVIOLET RADIATION;

EID: 20844440896     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1915507     Document Type: Article

References (22)

1. R. L. Kauffman, D. W. Phillion, and R. C. Spitzer, Appl. Opt. 32, 6897 (1993).
2. F. Jin and M. Richardson, Appl. Opt. 34, 5750 (1995).
3. M. Richardson, D. Torres, C. Depriest, F. Jin, and G. Shimkaveg, Opt. Commun. 145, 109 (1998).
4. A. Shimoura, S. Amano, S. Miyamoto, and T. Mochizuki, Appl. Phys. Lett. 72, 164 (1998).
5. R. L. Kauffman and C. Cerjan, J. Appl. Phys. 79, 2251 (1996).
6. C. Keyser, M. Richardson, and E. Turch, Proc. SPIE 4760, 454 (2002).
7. P. A. C. Jansson, B. A. M. Hansson, O. Hemberg, M. Otendal, A. Holmberg, J. de Groot, and H. M. Hertz, Appl. Phys. Lett. 84, 2256 (2004).
8. S. Ter-Avetisyan, M. Schnurer, H. Stiel, U. Vogt, W. Radloff, W. Karpov, W. Sandner, and P. V. Nickles, Phys. Rev. E 64, 036404 (2001).
9. B. Hansson, Proceedings of the Second International EUVL Symposium, Antwerp, 2003.
10. U. Stamm, I. Ahmad, I. Balogh, H. Birner, D. Bolshukhin, J. Brudermann, S. Enke, F. Flohrer, K. Gabel, S. Gotze, G. Hergenhan, J. Kleinschmidt, D. Klopfel, P. Kohler, V. Korobochko, B. Mader, R. Muller, J. Ringling, G. Schriever, C. D. Tran, and C. Ziener, Proceedings of the Second International EUVL Symposium, Antwerp, 2003.
11. Y. Shimada, H. Nishimura, K. Hashimoto, M. Yamaura, K. Shigemori, M. Nakai, S. Fujioka, S. Uchida, T. Okuno, T. Hibino, N. Ueda, R. Matsui, Y. Tao, K. Nagai, T. Norimatsu, T. Kawamura, A. Sunahara, K. Nishihara, N. Miyanaga, M. Nakatsuka, Y. Izawa, and C. Yamanaka, Proc. SPIE 5374, 912 (2004).
12. Y. Shimada, H. Nishimura, M. Nakai, K. Hashimoto, M. Yamaura, Y. Tao, K. Shigemori, T. Okuno, K. Nishihara, T. Kawamura, A. Sunahara, T. Nishikawa, A. Sasaki, K. Nagai, T. Norimatsu, S. Fujioka, S. Uchida, N. Miyanaga, Y. Izawa, and C. Yamanaka, Appl. Phys. Lett. 86, 051501 (2005).
13. H. Nishimura, K. Shigemori, M. Nakai, S. Fujioka, Y. Shimada, K. Hashimoto, M. Yamaura, S. Uchida, R. Matsui, T. Hibino, T. Okuno, Y. Tao, K. Nagai, T. Norimatsu, H. Nagatomo, Z. Vasilli, H. Furukawa, A. Sunahara, T. Kawamura, T. Nishikawa, M. Murakami, K. Nishihara, N. Miyanaga, M. Nakatsuka, and Y. Izawa, J. Plasma Fusion Res. 80, 325 (2004) (in Japanese).
14. K. Nishihara, H. Nishimura, T. Mochizuki, and A. Sasaki, Rev. Laser Eng. 32, 330 (2004) (in Japanese).
15. M. Yamaura, S. Uchida, A. Sunahara, Y. Shimada, K. Hashimoto, C. Yamanaka, K. Shigemori, S. Fujioka, T. Okuno, K. Nagai, T. Norimatsu, H. Nishimura, K. Nishihara, N. Miyanaga, and Y. Izawa, Proc. SPIE 5448, 1159 (2004).
16. E. Miura, H. Honda, K. Katsura, E. Takahashi, and K. Kondo, Appl. Phys. B: Lasers Opt. 70, 783 (2000).
17. M. Mori, T. Shiraishi, E. Takahashi, H. Suzuki, L. B. Sharma, E. Miura, and K. Kondo, J. Appl. Phys. 90, 3595 (2001).
18. E. Miura, H. Honda, K. Katsura, E. Takahashi, and K. Kondo, Jpn. J. Appl. Phys., Part 1 40, 7067 (2001).
19. H. Tanaka, K. Akinaga, A. Takahashi, and T. Okada, Jpn. J. Appl. Phys., Part 2 43, L585 (2004).
20. R. C. Spitzer, T. J. Orzechowski, and D. W. Phillion, J. Appl. Phys. 79, 2251 (1996).
21. A. Sunahara, H. Furukawa, T. Kawamura, T. Nishikawa, M. Murakami, and K. Nishikara, Proceedings of the Second International EUVL Symposium, Antwerp, 2003.
22. T. Nishikawa, H. Takabe, and K. Mima, Laser Part. Beams 11, 81 (1993).