Properties of ion debris emitted from laser-produced mass-limited tin plasmas for extreme ultraviolet light source applications

Applied Physics Letters

Volumn 87, Issue 24, 2005, Pages 1-3

  Fujioka, Shinsuke ^a   Nishimura, Hiroaki ^a   Nishihara, Katsunobu ^a   Murakami, Masakatsu ^a   Kang, Youngces G ^a   Gu, Qincui ^a   Nagai, Keiji ^a   Norimatsu, Takayoshi ^a   Miyanaga, Noriaki ^a   Izawa, Yasukazu ^a   Mima, Kunioki ^a   Shimada, Yoshinori ^b   Sunahara, Atsushi ^b   Furukawa, Hiroyuki ^b  

^a OSAKA UNIVERSITY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; PHOTOLITHOGRAPHY; TIN; ULTRAVIOLET RADIATION;

CHARGE STATE; EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY; ION DEBRIS;

LASER PRODUCED PLASMAS;

EID: 30344466964     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2142102     Document Type: Article

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